JPS5678161A - Manufacture of npn type transistor - Google Patents
Manufacture of npn type transistorInfo
- Publication number
- JPS5678161A JPS5678161A JP15537879A JP15537879A JPS5678161A JP S5678161 A JPS5678161 A JP S5678161A JP 15537879 A JP15537879 A JP 15537879A JP 15537879 A JP15537879 A JP 15537879A JP S5678161 A JPS5678161 A JP S5678161A
- Authority
- JP
- Japan
- Prior art keywords
- film
- type
- region
- covered
- quartz tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 9
- 235000012239 silicon dioxide Nutrition 0.000 abstract 6
- 229910052681 coesite Inorganic materials 0.000 abstract 3
- 229910052906 cristobalite Inorganic materials 0.000 abstract 3
- 239000010453 quartz Substances 0.000 abstract 3
- 239000000377 silicon dioxide Substances 0.000 abstract 3
- 229910052682 stishovite Inorganic materials 0.000 abstract 3
- 229910052905 tridymite Inorganic materials 0.000 abstract 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 2
- 229910052698 phosphorus Inorganic materials 0.000 abstract 2
- 239000011574 phosphorus Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 239000011863 silicon-based powder Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Bipolar Transistors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15537879A JPS5678161A (en) | 1979-11-29 | 1979-11-29 | Manufacture of npn type transistor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15537879A JPS5678161A (en) | 1979-11-29 | 1979-11-29 | Manufacture of npn type transistor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5678161A true JPS5678161A (en) | 1981-06-26 |
Family
ID=15604626
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15537879A Pending JPS5678161A (en) | 1979-11-29 | 1979-11-29 | Manufacture of npn type transistor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5678161A (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS492427A (ja) * | 1972-04-18 | 1974-01-10 | ||
JPS49123284A (ja) * | 1973-03-28 | 1974-11-26 | ||
JPS49126277A (ja) * | 1973-04-04 | 1974-12-03 |
-
1979
- 1979-11-29 JP JP15537879A patent/JPS5678161A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS492427A (ja) * | 1972-04-18 | 1974-01-10 | ||
JPS49123284A (ja) * | 1973-03-28 | 1974-11-26 | ||
JPS49126277A (ja) * | 1973-04-04 | 1974-12-03 |
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