JPS5669537A - Defect inspection device - Google Patents

Defect inspection device

Info

Publication number
JPS5669537A
JPS5669537A JP14627679A JP14627679A JPS5669537A JP S5669537 A JPS5669537 A JP S5669537A JP 14627679 A JP14627679 A JP 14627679A JP 14627679 A JP14627679 A JP 14627679A JP S5669537 A JPS5669537 A JP S5669537A
Authority
JP
Japan
Prior art keywords
inspection device
defect inspection
defect
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14627679A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6216372B2 (enExample
Inventor
Masahiro Kishi
Yasukazu Sano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP14627679A priority Critical patent/JPS5669537A/ja
Publication of JPS5669537A publication Critical patent/JPS5669537A/ja
Publication of JPS6216372B2 publication Critical patent/JPS6216372B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP14627679A 1979-11-12 1979-11-12 Defect inspection device Granted JPS5669537A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14627679A JPS5669537A (en) 1979-11-12 1979-11-12 Defect inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14627679A JPS5669537A (en) 1979-11-12 1979-11-12 Defect inspection device

Publications (2)

Publication Number Publication Date
JPS5669537A true JPS5669537A (en) 1981-06-10
JPS6216372B2 JPS6216372B2 (enExample) 1987-04-13

Family

ID=15404060

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14627679A Granted JPS5669537A (en) 1979-11-12 1979-11-12 Defect inspection device

Country Status (1)

Country Link
JP (1) JPS5669537A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58142247A (ja) * 1982-02-18 1983-08-24 Fuji Electric Co Ltd 検査装置
JPH01120652U (enExample) * 1988-02-05 1989-08-16
JP2011196982A (ja) * 2010-03-17 2011-10-06 Cognex Kk 欠陥検出方法、欠陥検出装置、及びプログラム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5434886A (en) * 1977-08-24 1979-03-14 Kanebo Ltd Inspector

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5434886A (en) * 1977-08-24 1979-03-14 Kanebo Ltd Inspector

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58142247A (ja) * 1982-02-18 1983-08-24 Fuji Electric Co Ltd 検査装置
JPH01120652U (enExample) * 1988-02-05 1989-08-16
JP2011196982A (ja) * 2010-03-17 2011-10-06 Cognex Kk 欠陥検出方法、欠陥検出装置、及びプログラム

Also Published As

Publication number Publication date
JPS6216372B2 (enExample) 1987-04-13

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