JPS53106083A - Defect inspecting apparatus - Google Patents

Defect inspecting apparatus

Info

Publication number
JPS53106083A
JPS53106083A JP2009477A JP2009477A JPS53106083A JP S53106083 A JPS53106083 A JP S53106083A JP 2009477 A JP2009477 A JP 2009477A JP 2009477 A JP2009477 A JP 2009477A JP S53106083 A JPS53106083 A JP S53106083A
Authority
JP
Japan
Prior art keywords
inspecting apparatus
defect inspecting
defect
inspection
signals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009477A
Other languages
Japanese (ja)
Other versions
JPS61578B2 (en
Inventor
Chiaki Fukazawa
Seikichi Nishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP2009477A priority Critical patent/JPS53106083A/en
Publication of JPS53106083A publication Critical patent/JPS53106083A/en
Publication of JPS61578B2 publication Critical patent/JPS61578B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To positively detect the surface defects of the object to be examined and make possible the automation of inspection by extracting only the defect signals of more than level of the formation noise signal from the output signals of a detection circuit in a defect inspection by photo-electric conversion.
JP2009477A 1977-02-25 1977-02-25 Defect inspecting apparatus Granted JPS53106083A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009477A JPS53106083A (en) 1977-02-25 1977-02-25 Defect inspecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009477A JPS53106083A (en) 1977-02-25 1977-02-25 Defect inspecting apparatus

Publications (2)

Publication Number Publication Date
JPS53106083A true JPS53106083A (en) 1978-09-14
JPS61578B2 JPS61578B2 (en) 1986-01-09

Family

ID=12017516

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009477A Granted JPS53106083A (en) 1977-02-25 1977-02-25 Defect inspecting apparatus

Country Status (1)

Country Link
JP (1) JPS53106083A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6224133A (en) * 1985-07-24 1987-02-02 Toshiba Corp Automatic binary-coding system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6224133A (en) * 1985-07-24 1987-02-02 Toshiba Corp Automatic binary-coding system

Also Published As

Publication number Publication date
JPS61578B2 (en) 1986-01-09

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