JPS52125388A - Defect inspection apparatus - Google Patents

Defect inspection apparatus

Info

Publication number
JPS52125388A
JPS52125388A JP4152076A JP4152076A JPS52125388A JP S52125388 A JPS52125388 A JP S52125388A JP 4152076 A JP4152076 A JP 4152076A JP 4152076 A JP4152076 A JP 4152076A JP S52125388 A JPS52125388 A JP S52125388A
Authority
JP
Japan
Prior art keywords
inspection apparatus
defect inspection
gate
closing
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4152076A
Other languages
Japanese (ja)
Other versions
JPS5728104B2 (en
Inventor
Yukio Uenishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Tateisi Electronics Co filed Critical Omron Tateisi Electronics Co
Priority to JP4152076A priority Critical patent/JPS52125388A/en
Publication of JPS52125388A publication Critical patent/JPS52125388A/en
Publication of JPS5728104B2 publication Critical patent/JPS5728104B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To prevent false discrimination of unnecessary defect signals and perform accurate inspection by detecting that the detection output exceeds a specified level thereby closing the gate of a detection signal processing circuit.
JP4152076A 1976-04-13 1976-04-13 Defect inspection apparatus Granted JPS52125388A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4152076A JPS52125388A (en) 1976-04-13 1976-04-13 Defect inspection apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4152076A JPS52125388A (en) 1976-04-13 1976-04-13 Defect inspection apparatus

Publications (2)

Publication Number Publication Date
JPS52125388A true JPS52125388A (en) 1977-10-21
JPS5728104B2 JPS5728104B2 (en) 1982-06-15

Family

ID=12610646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4152076A Granted JPS52125388A (en) 1976-04-13 1976-04-13 Defect inspection apparatus

Country Status (1)

Country Link
JP (1) JPS52125388A (en)

Also Published As

Publication number Publication date
JPS5728104B2 (en) 1982-06-15

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