JPS5497483A - Defect inspector - Google Patents

Defect inspector

Info

Publication number
JPS5497483A
JPS5497483A JP449478A JP449478A JPS5497483A JP S5497483 A JPS5497483 A JP S5497483A JP 449478 A JP449478 A JP 449478A JP 449478 A JP449478 A JP 449478A JP S5497483 A JPS5497483 A JP S5497483A
Authority
JP
Japan
Prior art keywords
defects
noises
inspection
noise
scanning lines
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP449478A
Other languages
Japanese (ja)
Other versions
JPS633256B2 (en
Inventor
Mitsuhito Kamei
Keiji Nagamine
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP449478A priority Critical patent/JPS5497483A/en
Publication of JPS5497483A publication Critical patent/JPS5497483A/en
Publication of JPS633256B2 publication Critical patent/JPS633256B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To inspect the approximate sizes of defects with minor errors by judging the presence or not of superposition of noises of the detection signals obtained for scanning lines at the optical scanning and letting the results of inspection for the adjoining scanning lines where no noises are superposed substitute. CONSTITUTION:The surface inspection signals from the surface of the object being inspected through optical scanning become pulses of the widths outputted by a waveform shaping circuit 10 according to the magnitudes of the defects. These pulses are counted with a counter 11 which counts clocks. The count values corresponding to the magnitudes of the defects are stored in a memory 12. On the other hand, when any noise of the surface detection signals is detected with a noise detector 14, a data selector 13 is controlled and when the noise is generated, the result of the inspection for the adjoining scanning lines having been stored in the memory 12 output as a substitute. Hence, the approximate sizes of the surface defects may be inspected with minor errors without any effect of noises.
JP449478A 1978-01-18 1978-01-18 Defect inspector Granted JPS5497483A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP449478A JPS5497483A (en) 1978-01-18 1978-01-18 Defect inspector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP449478A JPS5497483A (en) 1978-01-18 1978-01-18 Defect inspector

Publications (2)

Publication Number Publication Date
JPS5497483A true JPS5497483A (en) 1979-08-01
JPS633256B2 JPS633256B2 (en) 1988-01-22

Family

ID=11585620

Family Applications (1)

Application Number Title Priority Date Filing Date
JP449478A Granted JPS5497483A (en) 1978-01-18 1978-01-18 Defect inspector

Country Status (1)

Country Link
JP (1) JPS5497483A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01206241A (en) * 1988-02-12 1989-08-18 Fuji Photo Film Co Ltd Defect detecting method
JP2011185809A (en) * 2010-03-10 2011-09-22 Honda Motor Co Ltd Non-destructive inspection device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01206241A (en) * 1988-02-12 1989-08-18 Fuji Photo Film Co Ltd Defect detecting method
JP2011185809A (en) * 2010-03-10 2011-09-22 Honda Motor Co Ltd Non-destructive inspection device

Also Published As

Publication number Publication date
JPS633256B2 (en) 1988-01-22

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