JPS5666064A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5666064A
JPS5666064A JP14178479A JP14178479A JPS5666064A JP S5666064 A JPS5666064 A JP S5666064A JP 14178479 A JP14178479 A JP 14178479A JP 14178479 A JP14178479 A JP 14178479A JP S5666064 A JPS5666064 A JP S5666064A
Authority
JP
Japan
Prior art keywords
junction
capacitance
film
substrate
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14178479A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6243347B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Nishizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP14178479A priority Critical patent/JPS5666064A/ja
Publication of JPS5666064A publication Critical patent/JPS5666064A/ja
Publication of JPS6243347B2 publication Critical patent/JPS6243347B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
JP14178479A 1979-10-31 1979-10-31 Semiconductor device Granted JPS5666064A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14178479A JPS5666064A (en) 1979-10-31 1979-10-31 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14178479A JPS5666064A (en) 1979-10-31 1979-10-31 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS5666064A true JPS5666064A (en) 1981-06-04
JPS6243347B2 JPS6243347B2 (enrdf_load_stackoverflow) 1987-09-12

Family

ID=15300076

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14178479A Granted JPS5666064A (en) 1979-10-31 1979-10-31 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5666064A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6037765A (ja) * 1983-08-11 1985-02-27 Nec Corp 半導体装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6037765A (ja) * 1983-08-11 1985-02-27 Nec Corp 半導体装置

Also Published As

Publication number Publication date
JPS6243347B2 (enrdf_load_stackoverflow) 1987-09-12

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