JPS5661733A - Field emission cathode and its manufacture - Google Patents

Field emission cathode and its manufacture

Info

Publication number
JPS5661733A
JPS5661733A JP13641079A JP13641079A JPS5661733A JP S5661733 A JPS5661733 A JP S5661733A JP 13641079 A JP13641079 A JP 13641079A JP 13641079 A JP13641079 A JP 13641079A JP S5661733 A JPS5661733 A JP S5661733A
Authority
JP
Japan
Prior art keywords
field emission
ambient
oxygen gas
emitted
depth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13641079A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6223418B2 (enrdf_load_stackoverflow
Inventor
Shigeyuki Hosoki
Yoshihiko Yamamoto
Hideo Todokoro
Susumu Kawase
Yasuharu Hirai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13641079A priority Critical patent/JPS5661733A/ja
Priority to US06/198,176 priority patent/US4379250A/en
Priority to DE19803039283 priority patent/DE3039283A1/de
Priority to NL8005772A priority patent/NL8005772A/nl
Publication of JPS5661733A publication Critical patent/JPS5661733A/ja
Publication of JPS6223418B2 publication Critical patent/JPS6223418B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes

Landscapes

  • Cold Cathode And The Manufacture (AREA)
JP13641079A 1979-10-19 1979-10-24 Field emission cathode and its manufacture Granted JPS5661733A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP13641079A JPS5661733A (en) 1979-10-24 1979-10-24 Field emission cathode and its manufacture
US06/198,176 US4379250A (en) 1979-10-19 1980-10-17 Field emission cathode and method of fabricating the same
DE19803039283 DE3039283A1 (de) 1979-10-19 1980-10-17 Feldemissionskathode und verfahren zu ihrer herstellung
NL8005772A NL8005772A (nl) 1979-10-19 1980-10-20 Veldemissiekathode en werkwijze ter vervaardiging van een dergelijke kathode.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13641079A JPS5661733A (en) 1979-10-24 1979-10-24 Field emission cathode and its manufacture

Publications (2)

Publication Number Publication Date
JPS5661733A true JPS5661733A (en) 1981-05-27
JPS6223418B2 JPS6223418B2 (enrdf_load_stackoverflow) 1987-05-22

Family

ID=15174504

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13641079A Granted JPS5661733A (en) 1979-10-19 1979-10-24 Field emission cathode and its manufacture

Country Status (1)

Country Link
JP (1) JPS5661733A (enrdf_load_stackoverflow)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5971232A (ja) * 1982-10-14 1984-04-21 Natl Inst For Res In Inorg Mater 表面酸化型炭化物フィールドエミッターの製造法
JPS6079636A (ja) * 1983-10-07 1985-05-07 Hitachi Ltd 熱電界放射陰極とその応用装置
JPS6086728A (ja) * 1983-10-19 1985-05-16 Natl Inst For Res In Inorg Mater フイ−ルド・エミツタ−
JPH01186740A (ja) * 1988-01-18 1989-07-26 Canon Inc 電子放出素子およびその製造方法
US5938495A (en) * 1996-05-10 1999-08-17 Nec Corporation Method of manufacturing a field emission cold cathode capable of stably producing a high emission current
JP2006134638A (ja) * 2004-11-04 2006-05-25 Univ Waseda 電子光学装置用電子ビーム源
EP1950786A3 (en) * 2007-01-24 2009-03-25 FEI Company Cold field emitter
JP2009238443A (ja) * 2008-03-26 2009-10-15 Univ Waseda 電子源及び電子源の製造方法
WO2011142054A1 (ja) * 2010-05-10 2011-11-17 電気化学工業株式会社 電子源
US8736170B1 (en) 2011-02-22 2014-05-27 Fei Company Stable cold field emission electron source

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01247877A (ja) * 1988-03-30 1989-10-03 Aisin Seiki Co Ltd 電磁圧力制御弁

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5971232A (ja) * 1982-10-14 1984-04-21 Natl Inst For Res In Inorg Mater 表面酸化型炭化物フィールドエミッターの製造法
JPS6079636A (ja) * 1983-10-07 1985-05-07 Hitachi Ltd 熱電界放射陰極とその応用装置
JPS6086728A (ja) * 1983-10-19 1985-05-16 Natl Inst For Res In Inorg Mater フイ−ルド・エミツタ−
JPH01186740A (ja) * 1988-01-18 1989-07-26 Canon Inc 電子放出素子およびその製造方法
US5938495A (en) * 1996-05-10 1999-08-17 Nec Corporation Method of manufacturing a field emission cold cathode capable of stably producing a high emission current
JP2006134638A (ja) * 2004-11-04 2006-05-25 Univ Waseda 電子光学装置用電子ビーム源
EP1950786A3 (en) * 2007-01-24 2009-03-25 FEI Company Cold field emitter
US7888654B2 (en) 2007-01-24 2011-02-15 Fei Company Cold field emitter
US8217565B2 (en) 2007-01-24 2012-07-10 Fei Company Cold field emitter
JP2009238443A (ja) * 2008-03-26 2009-10-15 Univ Waseda 電子源及び電子源の製造方法
WO2011142054A1 (ja) * 2010-05-10 2011-11-17 電気化学工業株式会社 電子源
JP2011238459A (ja) * 2010-05-10 2011-11-24 Denki Kagaku Kogyo Kk 電子源
US8593048B2 (en) 2010-05-10 2013-11-26 Denki Kagaku Kogyo Kabushiki Kaisha Electron source having a tungsten single crystal electrode
US8736170B1 (en) 2011-02-22 2014-05-27 Fei Company Stable cold field emission electron source

Also Published As

Publication number Publication date
JPS6223418B2 (enrdf_load_stackoverflow) 1987-05-22

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