JPS5661734A - Field emission cathode and its manufacture - Google Patents

Field emission cathode and its manufacture

Info

Publication number
JPS5661734A
JPS5661734A JP13641179A JP13641179A JPS5661734A JP S5661734 A JPS5661734 A JP S5661734A JP 13641179 A JP13641179 A JP 13641179A JP 13641179 A JP13641179 A JP 13641179A JP S5661734 A JPS5661734 A JP S5661734A
Authority
JP
Japan
Prior art keywords
field emission
needle cathode
nitrogen gas
cathode
monoatomic layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13641179A
Other languages
Japanese (ja)
Inventor
Shigeyuki Hosoki
Yoshihiko Yamamoto
Hideo Todokoro
Susumu Kawase
Yasuharu Hirai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13641179A priority Critical patent/JPS5661734A/en
Publication of JPS5661734A publication Critical patent/JPS5661734A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes

Abstract

PURPOSE:To take out large probe current stably by adsorbing a metal having specific work function through nitrogen onto the surface of area where the electron is emitted from a needle cathode with the depth not exceeding that of monoatomic layer. CONSTITUTION:In a vacuum ambient where the field emission can be performed, a metal having the work function lower than that of needle cathode 1 is deposited with depth approximately same with that of monoatomic layer onto the surface of area where at least the electron is emitted from a needle cathode 1. Thereafter proper amount of nitrogen gas is provided into the vacuum ambient to adsorb the nitrogen gas with the depth approximately same with that of monomolecular layer onto the metallic monoatomic layer, then the needle cathode 1 is heated under the temperature range of 800-1,300 deg.C. Thereafter the nitrogen gas is evacuated to return to the vacuum ambient where the field emission can be performed, and the needle cathode 1 is heated for 1-10sec under the temperature range of 1,300- 1,500 deg.C.
JP13641179A 1979-10-24 1979-10-24 Field emission cathode and its manufacture Pending JPS5661734A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13641179A JPS5661734A (en) 1979-10-24 1979-10-24 Field emission cathode and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13641179A JPS5661734A (en) 1979-10-24 1979-10-24 Field emission cathode and its manufacture

Publications (1)

Publication Number Publication Date
JPS5661734A true JPS5661734A (en) 1981-05-27

Family

ID=15174527

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13641179A Pending JPS5661734A (en) 1979-10-24 1979-10-24 Field emission cathode and its manufacture

Country Status (1)

Country Link
JP (1) JPS5661734A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5763880A (en) * 1995-03-14 1998-06-09 Hitachi, Ltd. Cathode, electron beam emission apparatus using the same, and method of manufacturing the cathode

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5763880A (en) * 1995-03-14 1998-06-09 Hitachi, Ltd. Cathode, electron beam emission apparatus using the same, and method of manufacturing the cathode

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