JPS5654297A - Crystal growing method - Google Patents

Crystal growing method

Info

Publication number
JPS5654297A
JPS5654297A JP13022379A JP13022379A JPS5654297A JP S5654297 A JPS5654297 A JP S5654297A JP 13022379 A JP13022379 A JP 13022379A JP 13022379 A JP13022379 A JP 13022379A JP S5654297 A JPS5654297 A JP S5654297A
Authority
JP
Japan
Prior art keywords
pulling
crystals
crystal
crucible
plural
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13022379A
Other languages
Japanese (ja)
Inventor
Takeshi Konishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP13022379A priority Critical patent/JPS5654297A/en
Publication of JPS5654297A publication Critical patent/JPS5654297A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE: To increase the pulling amount of a crystal using small seed crystals in the Czochralski method by simultaneously pulling plural single crystals from molten material in one crucible.
CONSTITUTION: A crucible 1 is installed inside a protective cylinder 10 and a cover 9. A material is placed in the crucible 1 and heated with the output coil 10 of an high-frequency oscillator. Sead crystals 4 fixed to the ends of plural crystal-pulling rods 30W36 are brought into contact with the surface of the molten material and are partially melted. Then, by self-revolving, associated crystal pulling rods 50W56 are pulled up so that plural single crystals are simultaneously grown and pulled up. It is possible to grow a single large-diameter crystal 5' by fixing seed crystals 4 having the same cut orientation to the pulling rods 3oW3n, pulling up, stopping self-revolving of each pulling rod when the diameter of single crystals reaches the desired value, and joining each of growing crystals.
COPYRIGHT: (C)1981,JPO&Japio
JP13022379A 1979-10-09 1979-10-09 Crystal growing method Pending JPS5654297A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13022379A JPS5654297A (en) 1979-10-09 1979-10-09 Crystal growing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13022379A JPS5654297A (en) 1979-10-09 1979-10-09 Crystal growing method

Publications (1)

Publication Number Publication Date
JPS5654297A true JPS5654297A (en) 1981-05-14

Family

ID=15029025

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13022379A Pending JPS5654297A (en) 1979-10-09 1979-10-09 Crystal growing method

Country Status (1)

Country Link
JP (1) JPS5654297A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5128583A (en) * 1974-09-05 1976-03-10 Nippon Denshi Kinzoku Kk HIKIAGETANKETSUSHOSEIZOHOHO
JPS52156780A (en) * 1976-06-22 1977-12-27 Gn Itsusuredobuaterusukii Ipur Apparatus for simultaneously growing several single crystals in melt

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5128583A (en) * 1974-09-05 1976-03-10 Nippon Denshi Kinzoku Kk HIKIAGETANKETSUSHOSEIZOHOHO
JPS52156780A (en) * 1976-06-22 1977-12-27 Gn Itsusuredobuaterusukii Ipur Apparatus for simultaneously growing several single crystals in melt

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