JPS5645905A - Formation of polymeric thin film and apparatus therefor - Google Patents

Formation of polymeric thin film and apparatus therefor

Info

Publication number
JPS5645905A
JPS5645905A JP12130479A JP12130479A JPS5645905A JP S5645905 A JPS5645905 A JP S5645905A JP 12130479 A JP12130479 A JP 12130479A JP 12130479 A JP12130479 A JP 12130479A JP S5645905 A JPS5645905 A JP S5645905A
Authority
JP
Japan
Prior art keywords
substrate
monomer
molecules
ionized
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12130479A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6123924B2 (enrdf_load_stackoverflow
Inventor
Yoichi Mikami
Masahiro Hotta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sekisui Chemical Co Ltd
Original Assignee
Sekisui Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sekisui Chemical Co Ltd filed Critical Sekisui Chemical Co Ltd
Priority to JP12130479A priority Critical patent/JPS5645905A/ja
Publication of JPS5645905A publication Critical patent/JPS5645905A/ja
Publication of JPS6123924B2 publication Critical patent/JPS6123924B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrostatic Spraying Apparatus (AREA)
  • Polymerisation Methods In General (AREA)
JP12130479A 1979-09-20 1979-09-20 Formation of polymeric thin film and apparatus therefor Granted JPS5645905A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12130479A JPS5645905A (en) 1979-09-20 1979-09-20 Formation of polymeric thin film and apparatus therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12130479A JPS5645905A (en) 1979-09-20 1979-09-20 Formation of polymeric thin film and apparatus therefor

Publications (2)

Publication Number Publication Date
JPS5645905A true JPS5645905A (en) 1981-04-25
JPS6123924B2 JPS6123924B2 (enrdf_load_stackoverflow) 1986-06-09

Family

ID=14807933

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12130479A Granted JPS5645905A (en) 1979-09-20 1979-09-20 Formation of polymeric thin film and apparatus therefor

Country Status (1)

Country Link
JP (1) JPS5645905A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6123924B2 (enrdf_load_stackoverflow) 1986-06-09

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