JPS5558230A - Method of forming cured siox coating film - Google Patents

Method of forming cured siox coating film

Info

Publication number
JPS5558230A
JPS5558230A JP13002678A JP13002678A JPS5558230A JP S5558230 A JPS5558230 A JP S5558230A JP 13002678 A JP13002678 A JP 13002678A JP 13002678 A JP13002678 A JP 13002678A JP S5558230 A JPS5558230 A JP S5558230A
Authority
JP
Japan
Prior art keywords
siox coating
plastic material
electrode
transparent plastic
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13002678A
Other languages
Japanese (ja)
Inventor
Yoichi Murayama
Mamoru Mizuhashi
Tadatoshi Kamimori
Koichi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to JP13002678A priority Critical patent/JPS5558230A/en
Publication of JPS5558230A publication Critical patent/JPS5558230A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10—Glass or silica

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:Cured SiOx coating films are formed on the surface of plastic transparent moldings by the high-frequency ion plating method, thus giving cured SiOx coating films free from releasing and cracking. CONSTITUTION:Transparent plastic material 8 that is supported by base holder 9 equipped with electrode 10 on the back surface and boat 15 containing SiOx (x is 1-2) as the vapor source and arranged in vacuum tank 14 of a high-frequency ion plating unit and the transparent plastic material 8 is heated with halogen lamp heater 12 to 60-110 deg.C. Then, an inert gas is introduced into tank 14 and the pressure of the gas is adjusted to 10<-3>-10<-5>Torr. Subsequently, high-frequency power 4 of incidental RF power 50-200W and accelerating voltage 0.25-2.0KV is applied to RF coil 5 to effect the high-frequency discharge and generate the ions of the inert gas. At the same time, a direct current is applied to electrode of vaporizer 1, net electrode 10 to heat the vapor source 2 and vaporize it. The vaporized particles are ionized to form cured SiOx coating film on the surface of the transparent plastic material 8.
JP13002678A 1978-10-24 1978-10-24 Method of forming cured siox coating film Pending JPS5558230A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13002678A JPS5558230A (en) 1978-10-24 1978-10-24 Method of forming cured siox coating film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13002678A JPS5558230A (en) 1978-10-24 1978-10-24 Method of forming cured siox coating film

Publications (1)

Publication Number Publication Date
JPS5558230A true JPS5558230A (en) 1980-04-30

Family

ID=15024312

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13002678A Pending JPS5558230A (en) 1978-10-24 1978-10-24 Method of forming cured siox coating film

Country Status (1)

Country Link
JP (1) JPS5558230A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63247351A (en) * 1987-04-01 1988-10-14 Sekisui Chem Co Ltd Manufacture of silicon compound-coated resin body

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50100173A (en) * 1974-01-09 1975-08-08
JPS50143875A (en) * 1974-05-09 1975-11-19
JPS5187579A (en) * 1975-01-31 1976-07-31 Citizen Watch Co Ltd
JPS51130686A (en) * 1975-05-10 1976-11-13 Orient Watch Co Ltd A method of forming a transparent oxide coating on exterior ornamental parts of watches and ornamental goods

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50100173A (en) * 1974-01-09 1975-08-08
JPS50143875A (en) * 1974-05-09 1975-11-19
JPS5187579A (en) * 1975-01-31 1976-07-31 Citizen Watch Co Ltd
JPS51130686A (en) * 1975-05-10 1976-11-13 Orient Watch Co Ltd A method of forming a transparent oxide coating on exterior ornamental parts of watches and ornamental goods

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63247351A (en) * 1987-04-01 1988-10-14 Sekisui Chem Co Ltd Manufacture of silicon compound-coated resin body

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