JPS5645898A - Manufacture of silicon carbide crystal - Google Patents

Manufacture of silicon carbide crystal

Info

Publication number
JPS5645898A
JPS5645898A JP12128079A JP12128079A JPS5645898A JP S5645898 A JPS5645898 A JP S5645898A JP 12128079 A JP12128079 A JP 12128079A JP 12128079 A JP12128079 A JP 12128079A JP S5645898 A JPS5645898 A JP S5645898A
Authority
JP
Japan
Prior art keywords
substrate
layer
stand
sic
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12128079A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6121198B2 (enrdf_load_stackoverflow
Inventor
Toshiki Inooku
Takeshi Sakurai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP12128079A priority Critical patent/JPS5645898A/ja
Priority to DE3002671A priority patent/DE3002671C2/de
Publication of JPS5645898A publication Critical patent/JPS5645898A/ja
Priority to US06/369,911 priority patent/US4582561A/en
Publication of JPS6121198B2 publication Critical patent/JPS6121198B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP12128079A 1979-01-25 1979-09-19 Manufacture of silicon carbide crystal Granted JPS5645898A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP12128079A JPS5645898A (en) 1979-09-19 1979-09-19 Manufacture of silicon carbide crystal
DE3002671A DE3002671C2 (de) 1979-01-25 1980-01-25 Verfahren zur Herstellung eines Siliciumcarbidsubstrats
US06/369,911 US4582561A (en) 1979-01-25 1982-04-19 Method for making a silicon carbide substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12128079A JPS5645898A (en) 1979-09-19 1979-09-19 Manufacture of silicon carbide crystal

Publications (2)

Publication Number Publication Date
JPS5645898A true JPS5645898A (en) 1981-04-25
JPS6121198B2 JPS6121198B2 (enrdf_load_stackoverflow) 1986-05-26

Family

ID=14807338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12128079A Granted JPS5645898A (en) 1979-01-25 1979-09-19 Manufacture of silicon carbide crystal

Country Status (1)

Country Link
JP (1) JPS5645898A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6562183B1 (en) * 1999-04-07 2003-05-13 Ngk Insulators, Ltd. Anti-corrosive parts for etching apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6562183B1 (en) * 1999-04-07 2003-05-13 Ngk Insulators, Ltd. Anti-corrosive parts for etching apparatus

Also Published As

Publication number Publication date
JPS6121198B2 (enrdf_load_stackoverflow) 1986-05-26

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