JPS5635353A - Electrode structure for lead-out of ion beam - Google Patents

Electrode structure for lead-out of ion beam

Info

Publication number
JPS5635353A
JPS5635353A JP11137279A JP11137279A JPS5635353A JP S5635353 A JPS5635353 A JP S5635353A JP 11137279 A JP11137279 A JP 11137279A JP 11137279 A JP11137279 A JP 11137279A JP S5635353 A JPS5635353 A JP S5635353A
Authority
JP
Japan
Prior art keywords
lead
electrode
ion beam
thick plate
spur gear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11137279A
Other languages
Japanese (ja)
Inventor
Yukihisa Taguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP11137279A priority Critical patent/JPS5635353A/en
Publication of JPS5635353A publication Critical patent/JPS5635353A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)

Abstract

PURPOSE:To perform easy works both for inspection replacement of an ion beam lead-out part and for fine adjustment of a slit relative position, by such a unification that the ion beam lead-out part, drive part and electrode lead-in part are mounted to a sheet of thick plate. CONSTITUTION:A T-shaped cylindrical shaft 6, to which a spur gear 4, retaining metal 9, spur gear 5 and a collar are successively mounted in their order, is engaged to a thick plate 7 on which an O-ring is mounted by a retaining plate 11, further to the end screwed part of the T-shaped cylindrical shaft 6 a decelerating electrode 2 is mounted, and an accelerating electrode 1 is set to this electrode 2 through an electric insulation with insulators 3. On the other hand, an insulator 14 with a built- in electrode lead-in terminal 13 is also mounted to the thick plate 7, further one end of a lead wire 17 is processed wiring to the accelerating electrode 1. Such a lead-out electrode structure as described is mounted to a vacuum chamber 18 with guide pins 21 as a guide and coupled to a drive mechanism consisting of gears thus to perform a thrust motion and rotary motion.
JP11137279A 1979-08-31 1979-08-31 Electrode structure for lead-out of ion beam Pending JPS5635353A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11137279A JPS5635353A (en) 1979-08-31 1979-08-31 Electrode structure for lead-out of ion beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11137279A JPS5635353A (en) 1979-08-31 1979-08-31 Electrode structure for lead-out of ion beam

Publications (1)

Publication Number Publication Date
JPS5635353A true JPS5635353A (en) 1981-04-08

Family

ID=14559514

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11137279A Pending JPS5635353A (en) 1979-08-31 1979-08-31 Electrode structure for lead-out of ion beam

Country Status (1)

Country Link
JP (1) JPS5635353A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5647570A (en) * 1994-04-21 1997-07-15 Shop Vac Corporation Vacuum cleaner motor mounting apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5647570A (en) * 1994-04-21 1997-07-15 Shop Vac Corporation Vacuum cleaner motor mounting apparatus

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