EP1649487A1 - Device for measuring and quantitative profiling of charged particle beams - Google Patents

Device for measuring and quantitative profiling of charged particle beams

Info

Publication number
EP1649487A1
EP1649487A1 EP03758647A EP03758647A EP1649487A1 EP 1649487 A1 EP1649487 A1 EP 1649487A1 EP 03758647 A EP03758647 A EP 03758647A EP 03758647 A EP03758647 A EP 03758647A EP 1649487 A1 EP1649487 A1 EP 1649487A1
Authority
EP
European Patent Office
Prior art keywords
feedthrough
electrical
collector
thimble
faraday collector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP03758647A
Other languages
German (de)
French (fr)
Other versions
EP1649487B1 (en
Inventor
Shripad Rajaram Halbe
Vinod Chandra Sahni
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
India Atomic Energy Department of
Original Assignee
India Atomic Energy Department of
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by India Atomic Energy Department of filed Critical India Atomic Energy Department of
Publication of EP1649487A1 publication Critical patent/EP1649487A1/en
Application granted granted Critical
Publication of EP1649487B1 publication Critical patent/EP1649487B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components

Definitions

  • the present invention relates to an electro-mechanical feedthrough for use in ultra high vacuum based analytical instruments and systems in which a beam of charged particles is produced, transported and detected by the intercepting target
  • the improved electro-mechanical device of the invention is useful for the quantitative profiling of the charged particle beams, with the help of Faraday collector mounted on the device, for use in vacuum based analytical instruments and systems, such as, mass spectrometers, ion and electron accelerators, electron beam welding machines etc
  • It can also be put to use while handling solid samples of ion sources held on a suitable mount (in place of the Faraday collector) and heating the sample by passing current through the heater that is in thermal contact with the sample Background and Prior Art
  • the ultra high vacuum based analytical instruments and systems handling charged particle beams it is often required to quantitatively know the profile of the beam as it comes out of the ion source and also at selected places in the passage of the beam to check the focusing, shape and spread of the beam or that of the constituent ion beams after say, mass separation
  • instruments such as
  • US Patent No 3522428 teaches an electrical detection arrangement for a mass spectrometer comprising a series of ion collectors mounted or mountable at respective positions at which they can collect ions in respective different regions of a mass spectrum, the collectors being adjustable in position relative to one another so that the selected ion beams in the mass spectrum may be intercepted by the respective individual collector
  • each Faraday collector is connected to a tongue connection that slides over a parallel output conductor that is connected to an output connection to port out the electrical signals across a feedthrough mounted at a suitable location on the vacuum chamber
  • the tongue connection has an indentation for receiving and engaging the output conductor
  • the output conductor has to be maintained under tension When the tongue connection slides over it to make contact, any loss of tension in the output conductor or yielding of the tongue connection due to any reason including its wear and tear, results in a loss of contact or poor contact of the Faraday collector with the electrical feedthrough thereby causing a deterioration in the final output electrical signal Limitation of this arrangement is not
  • Finnigan MATT instrument manual (issue 1992, Rev.1 ) teaches an adjustable multi-collector system of a Finnigan MATT thermal ionization mass spectrometer, in which the collector assemblies are guided during their movement by the insulated shaft on one side and the shaft connected to the output electrical lead on the other side.
  • the movement to the Faraday cup is given by the mechanical drive.
  • This arrangement of the prior art also makes use of sliding contact to the Faraday collector that is moved on two guide rails where one of the rails is connected to the electrical lead while the other is insulated.
  • initial adjustment has to be made between the rails so that they are parallel and match accurately with the guide ways machined in the Faraday collectors. Such adjustments are time consuming and may suffer from inaccuracy.
  • the prior art possess the problem that any clearance provided in the guide rods for smooth sliding or resulted due to wear and tear could cause a loss of output. It also requires more than one port on the vacuum, chamber.
  • each Faraday collector in the form of a cup is connected to the electrical feedthrough by a flexible lead in situ.
  • the object of the invention is to provide an improved integrated electromechanical feedthrough apparatus for imparting linear motion to the Faraday collector and eliminating any relative motion between the electrical and mechanical feedthroughs
  • Another object of the present invention is to provide an improved electromechanical feedthrough apparatus that eliminates the need for making an adjustment of the Faraday collector with respect to the electrical connection before and/or during use
  • a further object of the present invention is to provide an improved electromechanical feedthrough apparatus which requires a single port on the vacuum chamber
  • Yet another object of the present invention is to provide an improved electromechanical feedthrough apparatus which requires less fabrication while manufacturing and is thus economic
  • Yet another object of the present invention is to provide an improved electromechanical feedthrough apparatus which is compact yet highly reliable Summary of invention
  • the present invention provides an improved device for measuring and quantitative profiling of charged particle beams comprising (i) a linear motion feedthrough comprising a central shaft having a central opening, (n) an electrical feedthrough connected coaxially to said central shaft wherein said electrical feedthrough comprises a lead passing through said central opening , (in) thimble and sleeve mechanism connected to a part of the upper surface of said central shaft and having threads therebetween for providing said linear motion feedthrough by rotation of said thimble, (iv) means for receiving a Faraday collector in electrical communication with said lead, and (v) a Faraday collector adapted to be mounted to said means
  • FIG. 1 shows the assembly of the improved device in accordance with the present invention
  • This improved device comprises of a mechanical portion called a linear motion feedthrough and an electrical feedthrough (12) welded coaxially to central shaft (19) of the said linear motion feedthrough and the lead of the said electrical feedthrough (12) passes through the central opening in the shaft (19) of the linear motion feedthrough.
  • the shaft (19) is welded to the stainless steel bellows (21 ).
  • An electrical feedthrough (12) having a standard termination for connecting the output cable is co-axially welded to the end of the shaft (19) of the actuating device.
  • the extension shaft (24) protrudes inside the vacuum chamber.
  • the collared shaft (19) passes through the ball bearing (16).
  • the ball bearing is prevented from coming out of the housing (17) by a retainer ring (13) and from dust by a cover (15) having a central hole for passing the electrical feedthrough and fixed to housing (17) by countersunk screws (14).
  • the ball bearing (16) is slid over the end of the central shaft till it rests on the collar on the shaft (19) and inner step of the housing (17) that is screwed tight into the thimble (18).
  • the thumbscrew (33) is used for locking the thimble (18) against the threaded sleeve (20).
  • Scale marked on the threaded sleeve (20) and the circumferential markings on the thimble (18) accurately indicate the position of the thimble and in turn that of the Faraday collector (30).
  • the length of the inner recess on the thimble (18) less the size of the thumbscrew (33) represents the total travel of the Faraday collector (30).
  • the improved device is mounted on the vacuum chamber using the ultra high vacuum flange (22).
  • a ceramic insulator block (29) has a step to locate the Faraday collector (30).
  • the insulator block is screwed to the end of the extension shaft (24).
  • the shape, size and material of the Faraday collector depends upon the intensity of the ion beam impinging on it.
  • the lug or eyelet (27) connects the lead extension (26) to the threaded termination of the Faraday collector using the nut (32).
  • Sleeve nut (28) locks the orientation of the collector so that it faces normal to the direction of the incident beam.
  • the movement of the extension shaft is guided by two silver plated copper bush bearings (25) located at either end of the housing (23).
  • the lead of the electrical feedthrough is extended to suit the requirement either by welding or crimping of an adaptor (34).
  • the lead extension is insulated by ceramic sleeve (35).
  • the thimble (18) is rotated clockwise and the movement is measured directly by the scale marked on the threaded sleeve (20) and the circumferential markings on the thimble (18) Linear motion is simultaneously transmitted to the Faraday collector (30) mounted at the end of the shaft (19) to which the electrical feedthrough with its extension lead (26) is welded
  • the bellows (21 ) are relieved from torque by the ball bearing (16) Due to the absence of the relative movement between the linear motion and electrical feedthroughs, it is possible to make a rigid electrical connection to the Faraday collector
  • the improved device was used for profiling the total ion beam as it comes out of the ion source and also to track the trajectory of the dispersed beams on the collector side of an isotopic ratio mass spectrometer It uses a plate type Faraday collector (30) made of oxygen free high conductivity copper (OFHC) of a size to suit the profiling requirement of a thermal ionization mass spectrometer used for isotopic analysis at two locations namely (i) close to the ion source for measuring the total ion current and profiling and (n) at the refocusing planes to find out the actual position of the beams as they emerge from the magnetic analyzer
  • the Faraday collector (30) is mounted on a specially shaped insulating mount (29) made of machineable ceramic insulator that has a locating step for the plate collector Other shapes can be a bucket or a cup, or a plane wire
  • the insulator is screwed to the extension shaft (24) coupled to the main shaft (19) to which the hydro-formed corrugated stainless steel
  • the improved device of the present invention eliminates relative motion between the two feedthroughs that is observed in the prior art versions It eliminates need for making an adjustment of the Faraday collector before and/or during use with respect to the electrical connection and making connection between Faraday collector and electrical lead by a flexible wire inside the vacuum envelope that is prone for breakage due to tension or fatigue and folding or kinking
  • the new invention needs only single port on the vacuum chamber as against two ports required by all the prior art devices
  • the integration further offers the advantages of overall compactness and ruggedness and highest reliability

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

A co-axial electro-mechanical feedthrough for ultra high vacuum application is provided for both moving a Faraday collector as well as measuring the electrical signal set up by the impinging charged particles on the Faraday collector by placing electrical feedthrough inside the motion feedthrough. When the thimble of the motion feedthrough is rotated, linear motion is simultaneously transmitted to the co-axial arrangement of the Faraday collector and the electrical feedthrough without any relative motion between the two. The improved device has a standard ultra high vacuum flange for mounting on the vacuum chamber and requires only one port. The improved electro-mechanical device of the invention is useful for profiling the charged particle beams encountered in vacuum based analytical instruments and systems such as mass spectrometers, ion and electron accelerators and electron beam welding machines, etc.

Description

DEVICE FOR MEASURING AND QUANTITATIVE PROFILING OF CHARGED PARTICLE BEAMS
Field of invention The present invention relates to an electro-mechanical feedthrough for use in ultra high vacuum based analytical instruments and systems in which a beam of charged particles is produced, transported and detected by the intercepting target The improved electro-mechanical device of the invention is useful for the quantitative profiling of the charged particle beams, with the help of Faraday collector mounted on the device, for use in vacuum based analytical instruments and systems, such as, mass spectrometers, ion and electron accelerators, electron beam welding machines etc It can also be put to use while handling solid samples of ion sources held on a suitable mount (in place of the Faraday collector) and heating the sample by passing current through the heater that is in thermal contact with the sample Background and Prior Art In the ultra high vacuum based analytical instruments and systems handling charged particle beams it is often required to quantitatively know the profile of the beam as it comes out of the ion source and also at selected places in the passage of the beam to check the focusing, shape and spread of the beam or that of the constituent ion beams after say, mass separation In instruments such as thermal lonization mass spectrometers, a sample is ionized using a suitable technique The ions are brought out of the ion source and upon accelerating them, acquire definite energy The beam is usually a mixture of different masses After passing through a magnetic analyzer it is segregated into mass separated beams according to their mass to charge ratios The separated ion beams are further collected at their respective refocusmg points by placing Faraday collectors at these locations and converted into electrical signals The electrical signals give measure of the abundance of various constituent masses Similarly, if the Faraday collector intercepts the total ion beam before mass separation, its magnitude is a measure of the total ion current In the prior art devices, the mechanical feedthrough imparting motion to the Faraday collector and the electrical feedthrough carrying the electrical output of the Faraday collector to the amplifier are separately mounted on the vacuum chamber and the Faraday collector is moved to intercept the beam The electrical connection to the Faraday collector is provided either by using a sliding contact over or by a flexible wire connected to the electrical feedthrough
US Patent No 3522428 teaches an electrical detection arrangement for a mass spectrometer comprising a series of ion collectors mounted or mountable at respective positions at which they can collect ions in respective different regions of a mass spectrum, the collectors being adjustable in position relative to one another so that the selected ion beams in the mass spectrum may be intercepted by the respective individual collector According to a preferred embodiment of this US Patent each Faraday collector is connected to a tongue connection that slides over a parallel output conductor that is connected to an output connection to port out the electrical signals across a feedthrough mounted at a suitable location on the vacuum chamber The tongue connection has an indentation for receiving and engaging the output conductor The output conductor has to be maintained under tension When the tongue connection slides over it to make contact, any loss of tension in the output conductor or yielding of the tongue connection due to any reason including its wear and tear, results in a loss of contact or poor contact of the Faraday collector with the electrical feedthrough thereby causing a deterioration in the final output electrical signal Limitation of this arrangement is not only due to the need for initial tensioning of the conductor but also on account of the need to ensure alignment of the output conductor with the indentation in the tongue connector In fact in US 3522428 the electrical connection to the Faraday collector (cup), made by a sliding arrangement, cannot be as reliable as a fixed or rigid type of contact The reliability of a flexible contact cannot be assured, particularly for long traverse of the Faraday collector, due to the possibility of the flexible lead getting entangled or broken due to the fatigue The device also requires initial adjustment which may be inaccurate and encounter problems of loss or poor contact due to slackening of the fixed lead over which the contact is sliding or wear and tear. The arrangement also requires separate ports on the vacuum chamber for motion feedthrough and electrical feedthrough.
Finnigan MATT instrument manual (issue 1992, Rev.1 ) teaches an adjustable multi-collector system of a Finnigan MATT thermal ionization mass spectrometer, in which the collector assemblies are guided during their movement by the insulated shaft on one side and the shaft connected to the output electrical lead on the other side. The movement to the Faraday cup is given by the mechanical drive. This arrangement of the prior art also makes use of sliding contact to the Faraday collector that is moved on two guide rails where one of the rails is connected to the electrical lead while the other is insulated. Moreover, initial adjustment has to be made between the rails so that they are parallel and match accurately with the guide ways machined in the Faraday collectors. Such adjustments are time consuming and may suffer from inaccuracy. The prior art possess the problem that any clearance provided in the guide rods for smooth sliding or resulted due to wear and tear could cause a loss of output. It also requires more than one port on the vacuum, chamber.
A paper entitled "Design, Fabrication and Testing of Thermal lonisation Mass Spectrometer (TIMS)" by M. K. Gor et al. at 7th National Symposium on Mass Spectrometry 1996 held at DRDE, Gwalior, India in 1996 teaches an adjustable multi-collector arrangement. In this arrangement, each Faraday collector, in the form of a cup is connected to the electrical feedthrough by a flexible lead in situ. There are two differential linear motion feedthroughs, each carrying two collector cups, with the electrical feedthrough (to which the flexible leads from the Faraday cups are connected) being separately mounted on the vacuum chamber. Such an arrangement also poses problems of accessibility and visibility for making connections, and suffers from the threat of breakage of contact, due to fatigue caused by to and fro motion of the cups and consequent folding or kinking of flexible leads, especially for long travels of the Faraday collectors. In all above prior art devices there is also provided a secondary electron suppressor electrode, either built in or separate, to suppress the contribution of secondary electrons emitted by the collector (cup shaped) surface due to impact of the impinging ion beam
Thus there is a need of an improved device for tracking, profiling and measuring the intensity of a charged particle beam which does not possess the drawbacks of the prior art devices
Objects of the invention
The object of the invention is to provide an improved integrated electromechanical feedthrough apparatus for imparting linear motion to the Faraday collector and eliminating any relative motion between the electrical and mechanical feedthroughs
Another object of the present invention is to provide an improved electromechanical feedthrough apparatus that eliminates the need for making an adjustment of the Faraday collector with respect to the electrical connection before and/or during use
A further object of the present invention is to provide an improved electromechanical feedthrough apparatus which requires a single port on the vacuum chamber
Yet another object of the present invention is to provide an improved electromechanical feedthrough apparatus which requires less fabrication while manufacturing and is thus economic
Yet another object of the present invention is to provide an improved electromechanical feedthrough apparatus which is compact yet highly reliable Summary of invention
Accordingly, the present invention provides an improved device for measuring and quantitative profiling of charged particle beams comprising (i) a linear motion feedthrough comprising a central shaft having a central opening, (n) an electrical feedthrough connected coaxially to said central shaft wherein said electrical feedthrough comprises a lead passing through said central opening , (in) thimble and sleeve mechanism connected to a part of the upper surface of said central shaft and having threads therebetween for providing said linear motion feedthrough by rotation of said thimble, (iv) means for receiving a Faraday collector in electrical communication with said lead, and (v) a Faraday collector adapted to be mounted to said means
A co-axial electro-mechanical device for ultra high vacuum application is constructed by placing electrical feedthrough inside the motion feedthrough for measuring the electrical signal set up due to the impinging charged particles on the Faraday collector The Faraday collector is mounted on a ceramic insulator screwed to the end of the driving shaft accommodating the lead of the electrical feedthrough A ceramic sleeve insulates the central lead extension from the metallic parts to prevent grounding of the electrical signal The lead extension passing through the central opening in the driving shaft is directly connected to the Faraday collector to avoid use of separate flexible wire and makes it totally free from the problems mentioned in the prior art arrangement
Preferred embodiment of the present invention
A non-limiting preferred embodiment of the present invention is described below with reference to Figure 1 which shows the assembly of the improved device in accordance with the present invention This improved device comprises of a mechanical portion called a linear motion feedthrough and an electrical feedthrough (12) welded coaxially to central shaft (19) of the said linear motion feedthrough and the lead of the said electrical feedthrough (12) passes through the central opening in the shaft (19) of the linear motion feedthrough. The shaft (19) is welded to the stainless steel bellows (21 ). An electrical feedthrough (12) having a standard termination for connecting the output cable is co-axially welded to the end of the shaft (19) of the actuating device. The extension shaft (24) protrudes inside the vacuum chamber. The collared shaft (19) passes through the ball bearing (16). The ball bearing is prevented from coming out of the housing (17) by a retainer ring (13) and from dust by a cover (15) having a central hole for passing the electrical feedthrough and fixed to housing (17) by countersunk screws (14). The ball bearing (16) is slid over the end of the central shaft till it rests on the collar on the shaft (19) and inner step of the housing (17) that is screwed tight into the thimble (18). The thumbscrew (33) is used for locking the thimble (18) against the threaded sleeve (20). Scale marked on the threaded sleeve (20) and the circumferential markings on the thimble (18) accurately indicate the position of the thimble and in turn that of the Faraday collector (30). The length of the inner recess on the thimble (18) less the size of the thumbscrew (33) represents the total travel of the Faraday collector (30). The improved device is mounted on the vacuum chamber using the ultra high vacuum flange (22). A ceramic insulator block (29) has a step to locate the Faraday collector (30). The insulator block is screwed to the end of the extension shaft (24). The shape, size and material of the Faraday collector depends upon the intensity of the ion beam impinging on it. The lug or eyelet (27) connects the lead extension (26) to the threaded termination of the Faraday collector using the nut (32). Sleeve nut (28) locks the orientation of the collector so that it faces normal to the direction of the incident beam. The movement of the extension shaft is guided by two silver plated copper bush bearings (25) located at either end of the housing (23). The lead of the electrical feedthrough is extended to suit the requirement either by welding or crimping of an adaptor (34). The lead extension is insulated by ceramic sleeve (35). To move the Faraday collector (30) towards the beam, the thimble (18) is rotated clockwise and the movement is measured directly by the scale marked on the threaded sleeve (20) and the circumferential markings on the thimble (18) Linear motion is simultaneously transmitted to the Faraday collector (30) mounted at the end of the shaft (19) to which the electrical feedthrough with its extension lead (26) is welded The bellows (21 ) are relieved from torque by the ball bearing (16) Due to the absence of the relative movement between the linear motion and electrical feedthroughs, it is possible to make a rigid electrical connection to the Faraday collector
The improved device was used for profiling the total ion beam as it comes out of the ion source and also to track the trajectory of the dispersed beams on the collector side of an isotopic ratio mass spectrometer It uses a plate type Faraday collector (30) made of oxygen free high conductivity copper (OFHC) of a size to suit the profiling requirement of a thermal ionization mass spectrometer used for isotopic analysis at two locations namely (i) close to the ion source for measuring the total ion current and profiling and (n) at the refocusing planes to find out the actual position of the beams as they emerge from the magnetic analyzer The Faraday collector (30) is mounted on a specially shaped insulating mount (29) made of machineable ceramic insulator that has a locating step for the plate collector Other shapes can be a bucket or a cup, or a plane wire The insulator is screwed to the extension shaft (24) coupled to the main shaft (19) to which the hydro-formed corrugated stainless steel bellows (21 ) are welded The metallic cuff of a ceramic-metal type electrical feedthrough (12) is welded to the end of the mam shaft and the lead passes through the central openings of the main shaft and extension shaft (24) The plate collector is connected to the electrical feedthrough via a lead extension (26) insulated by re-crystallized alumina ceramic sleeve (35) for tapping the electrical signal caused by the impinging ion beam The Faraday collector is moved through a distance ranging from 20 mm to 40 mm during scanning The position is read accurately without backlash by a scale marked on the threaded sleeve (20) and the circumferential markings on the thimble (18) within 0 02mm and locked by the thumbscrew (33) The improved device is mounted on the vacuum chamber through a copper gasketted flange (22) of 70 mm diameter
Advantages of the invention The invention is an improved co-axial device comprising of a bellows sealed motion feedthrough used for imparting linear motion to the Faraday collector for the purpose of scanning the charged particle beam and an electrical feedthrough for transmission of the electrical output to the measuring device The arrangement offers following advantages
The improved device of the present invention eliminates relative motion between the two feedthroughs that is observed in the prior art versions It eliminates need for making an adjustment of the Faraday collector before and/or during use with respect to the electrical connection and making connection between Faraday collector and electrical lead by a flexible wire inside the vacuum envelope that is prone for breakage due to tension or fatigue and folding or kinking The new invention needs only single port on the vacuum chamber as against two ports required by all the prior art devices In view of the integration of the two feedthroughs in the improved device, there is a considerable reduction in the fabrication and the associated hardware and thus in the overall cost The integration further offers the advantages of overall compactness and ruggedness and highest reliability

Claims
CLAIMS An improved device for measuring and quantitative profiling of charged particle beams comprising
(i) a linear motion feedthrough comprising a central shaft having a central opening, (n) an electrical feedthrough connected coaxially to said central shaft wherein said electrical feedthrough comprises a lead passing through said central opening ,
(MI) thimble and sleeve mechanism connected to a part of the upper surface of said central shaft and having threads therebetween for providing said linear motion feedthrough by rotation of said thimble, (iv) means for receiving a Faraday collector in electrical communication with said lead, and
(v) a Faraday collector adapted to be mounted to said means
2 An improved device according to claim 1 , wherein said means for receiving Faraday collector is an insulator mount having central hole to accommodate said lead of electrical feedthrough for establishing electrical contact between said collector and said lead
3 An improved device according to claim 1 , wherein said central shaft is at least partially inside bellows being rigidly held to the central shaft An improved device according to claim 1 , wherein said central shaft comprises ball bearing for facilitating movement of said central shaft An improved device according to claim 1 , wherein said thimble and sleeve mechanism comprises a thumbscrew for locking said thimble and sleeve mechanism to prevent rotation
6. An improved device according to claim 1 , wherein said thimble has circumferential markings for indicating linear position of thimble.
7. A method for tracking, profiling and measuring the intensity of charged particle beam comprising:
(i) mounting a Faraday collector on ceramic insulator having a central hole to accommodate the rigid lead of an electrical feedthrough; (ii) placing the assembly of the said Faraday collector on the ceramic insulator into an ultra high vacuum compatible motion feedthrough capable of imparting linear motion to the said assembly; (iii) placing the electrical feedthrough inside the said motion feedthrough connecting the said Faraday collector to the measuring device.
8. An improved device for tracking, profiling and measuring the intensity of a charged particle beam in an ultra high vacuum system substantially as described herein in the text and drawing.
EP03758647A 2003-08-01 2003-08-01 Device for measuring and quantitative profiling of charged particle beams Expired - Lifetime EP1649487B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/IN2003/000260 WO2005013313A1 (en) 2003-08-01 2003-08-01 Device for measuring and quantitative profiling of charged particle beams

Publications (2)

Publication Number Publication Date
EP1649487A1 true EP1649487A1 (en) 2006-04-26
EP1649487B1 EP1649487B1 (en) 2007-03-07

Family

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AT (1) ATE356426T1 (en)
AU (1) AU2003274679A1 (en)
DE (1) DE60312396T2 (en)
DK (1) DK1649487T3 (en)
WO (1) WO2005013313A1 (en)

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Publication number Priority date Publication date Assignee Title
CN111128657A (en) * 2018-10-31 2020-05-08 北京中科信电子装备有限公司 Faraday vacuum mobile device
GB202019143D0 (en) * 2020-12-04 2021-01-20 Thermo Fisher Scient Bremen Gmbh Flexible muliple ion detector system
JP2023002483A (en) 2021-06-22 2023-01-10 ファイザー・インク Production of adeno-associated virus vector in insect cells

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Publication number Priority date Publication date Assignee Title
GB1161395A (en) * 1966-05-17 1969-08-13 Ass Elect Ind Improvements relating to Mass Spectrometers
DE3278486D1 (en) * 1981-12-07 1988-06-16 Vg Instr Group Improvements in or relating to multiple collector mass spectrometers
WO2001051183A1 (en) * 2000-01-07 2001-07-19 Proteros, Llc. Enhanced faraday cup for diagnostic measurements in an ion implanter

Non-Patent Citations (1)

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Title
See references of WO2005013313A1 *

Also Published As

Publication number Publication date
DE60312396D1 (en) 2007-04-19
AU2003274679A1 (en) 2005-02-15
ATE356426T1 (en) 2007-03-15
DE60312396T2 (en) 2007-11-29
WO2005013313A1 (en) 2005-02-10
DK1649487T3 (en) 2007-07-02
EP1649487B1 (en) 2007-03-07

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