JPS5633833A - Formation of positioning mark - Google Patents
Formation of positioning markInfo
- Publication number
- JPS5633833A JPS5633833A JP10990379A JP10990379A JPS5633833A JP S5633833 A JPS5633833 A JP S5633833A JP 10990379 A JP10990379 A JP 10990379A JP 10990379 A JP10990379 A JP 10990379A JP S5633833 A JPS5633833 A JP S5633833A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- film
- positioning mark
- oxide film
- oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10990379A JPS5633833A (en) | 1979-08-29 | 1979-08-29 | Formation of positioning mark |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10990379A JPS5633833A (en) | 1979-08-29 | 1979-08-29 | Formation of positioning mark |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5633833A true JPS5633833A (en) | 1981-04-04 |
| JPS6150376B2 JPS6150376B2 (enrdf_load_stackoverflow) | 1986-11-04 |
Family
ID=14522070
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10990379A Granted JPS5633833A (en) | 1979-08-29 | 1979-08-29 | Formation of positioning mark |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5633833A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008218656A (ja) * | 2007-03-02 | 2008-09-18 | Denso Corp | 半導体装置の製造方法及び半導体ウエハ |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4940872A (enrdf_load_stackoverflow) * | 1972-08-25 | 1974-04-17 | ||
| JPS5087283A (enrdf_load_stackoverflow) * | 1973-12-03 | 1975-07-14 |
-
1979
- 1979-08-29 JP JP10990379A patent/JPS5633833A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4940872A (enrdf_load_stackoverflow) * | 1972-08-25 | 1974-04-17 | ||
| JPS5087283A (enrdf_load_stackoverflow) * | 1973-12-03 | 1975-07-14 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008218656A (ja) * | 2007-03-02 | 2008-09-18 | Denso Corp | 半導体装置の製造方法及び半導体ウエハ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6150376B2 (enrdf_load_stackoverflow) | 1986-11-04 |
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