JPS5618753A - Preparation of chemical-sensitive element - Google Patents
Preparation of chemical-sensitive elementInfo
- Publication number
- JPS5618753A JPS5618753A JP9363179A JP9363179A JPS5618753A JP S5618753 A JPS5618753 A JP S5618753A JP 9363179 A JP9363179 A JP 9363179A JP 9363179 A JP9363179 A JP 9363179A JP S5618753 A JPS5618753 A JP S5618753A
- Authority
- JP
- Japan
- Prior art keywords
- portions
- elements
- chemical
- sensitive element
- scribed lines
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000126 substance Substances 0.000 title abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract 2
- 229910052710 silicon Inorganic materials 0.000 abstract 2
- 239000010703 silicon Substances 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- 229910052682 stishovite Inorganic materials 0.000 abstract 2
- 229910052905 tridymite Inorganic materials 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 1
- 239000011347 resin Substances 0.000 abstract 1
- 229920005989 resin Polymers 0.000 abstract 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9363179A JPS5618753A (en) | 1979-07-25 | 1979-07-25 | Preparation of chemical-sensitive element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9363179A JPS5618753A (en) | 1979-07-25 | 1979-07-25 | Preparation of chemical-sensitive element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5618753A true JPS5618753A (en) | 1981-02-21 |
JPS622266B2 JPS622266B2 (enrdf_load_stackoverflow) | 1987-01-19 |
Family
ID=14087672
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9363179A Granted JPS5618753A (en) | 1979-07-25 | 1979-07-25 | Preparation of chemical-sensitive element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5618753A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107576688A (zh) * | 2017-09-22 | 2018-01-12 | 铜陵泽辉电子有限责任公司 | 一种薄膜电容器精度自动化检测方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5466194A (en) * | 1977-11-04 | 1979-05-28 | Kuraray Co | Fet sensor |
-
1979
- 1979-07-25 JP JP9363179A patent/JPS5618753A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5466194A (en) * | 1977-11-04 | 1979-05-28 | Kuraray Co | Fet sensor |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107576688A (zh) * | 2017-09-22 | 2018-01-12 | 铜陵泽辉电子有限责任公司 | 一种薄膜电容器精度自动化检测方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS622266B2 (enrdf_load_stackoverflow) | 1987-01-19 |
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