JPS5617095A - Striped double-heterodyne junction semiconductor laser - Google Patents

Striped double-heterodyne junction semiconductor laser

Info

Publication number
JPS5617095A
JPS5617095A JP2477479A JP2477479A JPS5617095A JP S5617095 A JPS5617095 A JP S5617095A JP 2477479 A JP2477479 A JP 2477479A JP 2477479 A JP2477479 A JP 2477479A JP S5617095 A JPS5617095 A JP S5617095A
Authority
JP
Japan
Prior art keywords
prescribed
layer
width
type
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2477479A
Other languages
Japanese (ja)
Inventor
Shinsuke Ueno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP2477479A priority Critical patent/JPS5617095A/en
Publication of JPS5617095A publication Critical patent/JPS5617095A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/16Window-type lasers, i.e. with a region of non-absorbing material between the active region and the reflecting surface
    • H01S5/162Window-type lasers, i.e. with a region of non-absorbing material between the active region and the reflecting surface with window regions made by diffusion or disordening of the active layer

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)

Abstract

PURPOSE:To perform a stabilized lateral mode oscillation and to turn out a high optical output by providing a groove with a prescribed width parallel to a reflecting surface of a semiconductor substrate and also by providing a channel, having a prescribed width, directly intersecting with said groove. CONSTITUTION:On an N-type substrate 10, masks having a prescribed size against a cleavage plane are formed in a line at a prescribed interval and each line running parallel to each other at a prescribed interval using photo resistor method and grooves 101 and 102 are made successively. On this substrate, an N-type Al0.3Ga0.7As layer 11 is grown in a flat form. Subsequently, an active layer 12 and a layer 13, which is thicker than the layer 11, are formed. Then a window of a prescribed size is opened and a Zn diffusing region 14 is provided. An SiO2 film is then removed, an window is opened in the SiO2 film 16 newly formed on the layer 13 with the center point at stripes and a Zn diffusing region 17 is formed. The diffusion front 18 of the above is controlled so that it is located in the middle of the layer 13. Then P-type and N-type ohmic contacts 19 and 20 are formed. The cleavage is cut in a way that a resonator can be formed in the vicinity of the central part and that the width of the lateral direction is set at a value close to the prescribed one with the stripe active region as width center.
JP2477479A 1979-03-02 1979-03-02 Striped double-heterodyne junction semiconductor laser Pending JPS5617095A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2477479A JPS5617095A (en) 1979-03-02 1979-03-02 Striped double-heterodyne junction semiconductor laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2477479A JPS5617095A (en) 1979-03-02 1979-03-02 Striped double-heterodyne junction semiconductor laser

Publications (1)

Publication Number Publication Date
JPS5617095A true JPS5617095A (en) 1981-02-18

Family

ID=12147510

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2477479A Pending JPS5617095A (en) 1979-03-02 1979-03-02 Striped double-heterodyne junction semiconductor laser

Country Status (1)

Country Link
JP (1) JPS5617095A (en)

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