JPS56156763A - Finely working method and apparatus by plasma sputtering - Google Patents

Finely working method and apparatus by plasma sputtering

Info

Publication number
JPS56156763A
JPS56156763A JP5788980A JP5788980A JPS56156763A JP S56156763 A JPS56156763 A JP S56156763A JP 5788980 A JP5788980 A JP 5788980A JP 5788980 A JP5788980 A JP 5788980A JP S56156763 A JPS56156763 A JP S56156763A
Authority
JP
Japan
Prior art keywords
substrate
cathode
anode
electric
finely
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5788980A
Other languages
English (en)
Inventor
Hiroshi Yoneyama
Tsutomu Yamashita
Hideo Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokin Corp
Original Assignee
Tohoku Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tohoku Metal Industries Ltd filed Critical Tohoku Metal Industries Ltd
Priority to JP5788980A priority Critical patent/JPS56156763A/ja
Publication of JPS56156763A publication Critical patent/JPS56156763A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering
    • H01J37/3408—Planar magnetron sputtering

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP5788980A 1980-05-02 1980-05-02 Finely working method and apparatus by plasma sputtering Pending JPS56156763A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5788980A JPS56156763A (en) 1980-05-02 1980-05-02 Finely working method and apparatus by plasma sputtering

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5788980A JPS56156763A (en) 1980-05-02 1980-05-02 Finely working method and apparatus by plasma sputtering

Publications (1)

Publication Number Publication Date
JPS56156763A true JPS56156763A (en) 1981-12-03

Family

ID=13068548

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5788980A Pending JPS56156763A (en) 1980-05-02 1980-05-02 Finely working method and apparatus by plasma sputtering

Country Status (1)

Country Link
JP (1) JPS56156763A (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59139627A (ja) * 1983-01-31 1984-08-10 Hitachi Ltd ドライエツチング装置
JPS63109181A (ja) * 1986-10-23 1988-05-13 Anelva Corp テ−パ−エツチング方法とその装置
JPS6428921A (en) * 1987-07-24 1989-01-31 Tokuda Seisakusho Plasma treatment device
US5357073A (en) * 1992-03-09 1994-10-18 Nippondenso Co., Ltd. Electrical discharge machine
CN108698070A (zh) * 2016-12-29 2018-10-23 深圳市柔宇科技有限公司 光阻涂布工艺与载料装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59139627A (ja) * 1983-01-31 1984-08-10 Hitachi Ltd ドライエツチング装置
JPS63109181A (ja) * 1986-10-23 1988-05-13 Anelva Corp テ−パ−エツチング方法とその装置
JPS6428921A (en) * 1987-07-24 1989-01-31 Tokuda Seisakusho Plasma treatment device
US5357073A (en) * 1992-03-09 1994-10-18 Nippondenso Co., Ltd. Electrical discharge machine
CN108698070A (zh) * 2016-12-29 2018-10-23 深圳市柔宇科技有限公司 光阻涂布工艺与载料装置
CN108698070B (zh) * 2016-12-29 2021-09-24 深圳市柔宇科技股份有限公司 光阻涂布工艺与载料装置

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