JPS5614412A - Manufacture of amorphous silicon film - Google Patents

Manufacture of amorphous silicon film

Info

Publication number
JPS5614412A
JPS5614412A JP8968479A JP8968479A JPS5614412A JP S5614412 A JPS5614412 A JP S5614412A JP 8968479 A JP8968479 A JP 8968479A JP 8968479 A JP8968479 A JP 8968479A JP S5614412 A JPS5614412 A JP S5614412A
Authority
JP
Japan
Prior art keywords
substrate
film
alloy
container
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8968479A
Other languages
English (en)
Inventor
Akio Hara
Nobuhiko Fujita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP8968479A priority Critical patent/JPS5614412A/ja
Publication of JPS5614412A publication Critical patent/JPS5614412A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP8968479A 1979-07-13 1979-07-13 Manufacture of amorphous silicon film Pending JPS5614412A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8968479A JPS5614412A (en) 1979-07-13 1979-07-13 Manufacture of amorphous silicon film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8968479A JPS5614412A (en) 1979-07-13 1979-07-13 Manufacture of amorphous silicon film

Publications (1)

Publication Number Publication Date
JPS5614412A true JPS5614412A (en) 1981-02-12

Family

ID=13977586

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8968479A Pending JPS5614412A (en) 1979-07-13 1979-07-13 Manufacture of amorphous silicon film

Country Status (1)

Country Link
JP (1) JPS5614412A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61131835A (ja) * 1984-11-27 1986-06-19 Misawa Homes Co Ltd パネル芯材枠のプレス装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61131835A (ja) * 1984-11-27 1986-06-19 Misawa Homes Co Ltd パネル芯材枠のプレス装置
JPH0561061B2 (ja) * 1984-11-27 1993-09-03 Misawa Homes Co

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