JPS5613735A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5613735A
JPS5613735A JP8952479A JP8952479A JPS5613735A JP S5613735 A JPS5613735 A JP S5613735A JP 8952479 A JP8952479 A JP 8952479A JP 8952479 A JP8952479 A JP 8952479A JP S5613735 A JPS5613735 A JP S5613735A
Authority
JP
Japan
Prior art keywords
film
layer
gaas
stacked
masks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8952479A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6331097B2 (ko
Inventor
Toshio Sugawa
Takeshi Konuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP8952479A priority Critical patent/JPS5613735A/ja
Publication of JPS5613735A publication Critical patent/JPS5613735A/ja
Publication of JPS6331097B2 publication Critical patent/JPS6331097B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Formation Of Insulating Films (AREA)
  • Junction Field-Effect Transistors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
JP8952479A 1979-07-13 1979-07-13 Manufacture of semiconductor device Granted JPS5613735A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8952479A JPS5613735A (en) 1979-07-13 1979-07-13 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8952479A JPS5613735A (en) 1979-07-13 1979-07-13 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5613735A true JPS5613735A (en) 1981-02-10
JPS6331097B2 JPS6331097B2 (ko) 1988-06-22

Family

ID=13973185

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8952479A Granted JPS5613735A (en) 1979-07-13 1979-07-13 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5613735A (ko)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5884430A (ja) * 1981-11-14 1983-05-20 Daikin Ind Ltd レジスト膜の耐エツチング性増大方法
JPS60253278A (ja) * 1984-05-29 1985-12-13 Sony Corp 接合型電界効果型半導体装置の製法
US5074940A (en) * 1990-06-19 1991-12-24 Nippon Oil And Fats Co., Ltd. Composition for gas generating

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5264284A (en) * 1975-11-21 1977-05-27 Mitsubishi Electric Corp Semiconductor device
JPS5348458A (en) * 1976-10-14 1978-05-01 Fujitsu Ltd Production of semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5264284A (en) * 1975-11-21 1977-05-27 Mitsubishi Electric Corp Semiconductor device
JPS5348458A (en) * 1976-10-14 1978-05-01 Fujitsu Ltd Production of semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5884430A (ja) * 1981-11-14 1983-05-20 Daikin Ind Ltd レジスト膜の耐エツチング性増大方法
JPS60253278A (ja) * 1984-05-29 1985-12-13 Sony Corp 接合型電界効果型半導体装置の製法
JPH0713975B2 (ja) * 1984-05-29 1995-02-15 ソニー株式会社 接合型電界効果型半導体装置の製法
US5074940A (en) * 1990-06-19 1991-12-24 Nippon Oil And Fats Co., Ltd. Composition for gas generating

Also Published As

Publication number Publication date
JPS6331097B2 (ko) 1988-06-22

Similar Documents

Publication Publication Date Title
US3574010A (en) Fabrication of metal insulator semiconductor field effect transistors
US3900352A (en) Isolated fixed and variable threshold field effect transistor fabrication technique
JPS57109367A (en) Semiconductor memory device
JPS5613735A (en) Manufacture of semiconductor device
JPS56155531A (en) Manufacture of semiconductor device
JPS5688358A (en) Manufacture of semiconductor device
JPS56111264A (en) Manufacture of semiconductor device
JPS5717174A (en) Semiconductor device
JPS56153769A (en) Manufacture of semiconductor device
JPS5772379A (en) Manufacture of semiconductor devuce
JPS56103445A (en) Production of semiconductor device
JPS55107229A (en) Method of manufacturing semiconductor device
JPS5638842A (en) Manufacture of semiconductor device
JPS57107068A (en) Complementary mis semiconductor device
JPS5669868A (en) Manufacture of semiconductor device
JPS5650579A (en) Manufacture of junction type field effect semiconductor device
JPS5683972A (en) Manufacture of semiconductor device
JPS5739579A (en) Mos semiconductor device and manufacture thereof
JPS57155767A (en) Manufacture of semiconductor device
JPS5791537A (en) Manufacture of semiconductor device
JPS5596652A (en) Method of fabricating semiconductor device
JPS62131538A (ja) 半導体装置の製造方法
JPS54116185A (en) Manufacture for semiconductor device
JPS56140662A (en) Manufacture of field effect semiconductor of insulation gate complementary type
JPS5763859A (en) Preparation of semiconductor device