JPS56136967A - Method and apparatus for deionizing chemical copper plating bath - Google Patents
Method and apparatus for deionizing chemical copper plating bathInfo
- Publication number
- JPS56136967A JPS56136967A JP3823680A JP3823680A JPS56136967A JP S56136967 A JPS56136967 A JP S56136967A JP 3823680 A JP3823680 A JP 3823680A JP 3823680 A JP3823680 A JP 3823680A JP S56136967 A JPS56136967 A JP S56136967A
- Authority
- JP
- Japan
- Prior art keywords
- vessel
- bath
- ions
- plating
- acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007747 plating Methods 0.000 title abstract 7
- 239000010949 copper Substances 0.000 title abstract 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title abstract 3
- 229910052802 copper Inorganic materials 0.000 title abstract 3
- 239000000126 substance Substances 0.000 title abstract 3
- 238000000034 method Methods 0.000 title 1
- 150000002500 ions Chemical class 0.000 abstract 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 abstract 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 abstract 2
- 239000002253 acid Substances 0.000 abstract 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 abstract 2
- VLTRZXGMWDSKGL-UHFFFAOYSA-N perchloric acid Chemical compound OCl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-N 0.000 abstract 2
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 abstract 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-M Bicarbonate Chemical compound OC([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-M 0.000 abstract 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 abstract 1
- 150000007513 acids Chemical class 0.000 abstract 1
- 150000008044 alkali metal hydroxides Chemical class 0.000 abstract 1
- 239000002738 chelating agent Substances 0.000 abstract 1
- 239000003638 chemical reducing agent Substances 0.000 abstract 1
- 238000011033 desalting Methods 0.000 abstract 1
- 230000006866 deterioration Effects 0.000 abstract 1
- 235000019253 formic acid Nutrition 0.000 abstract 1
- 238000010979 pH adjustment Methods 0.000 abstract 1
Landscapes
- Chemically Coating (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3823680A JPS56136967A (en) | 1980-03-27 | 1980-03-27 | Method and apparatus for deionizing chemical copper plating bath |
| US06/160,201 US4324629A (en) | 1979-06-19 | 1980-06-17 | Process for regenerating chemical copper plating solution |
| DE3022962A DE3022962C2 (de) | 1979-06-19 | 1980-06-19 | Verfahren zum Regenerieren einer chemischen Verkupferungslösung |
| NLAANVRAGE8003553,A NL188683C (nl) | 1979-06-19 | 1980-06-19 | Werkwijze voor het regenereren van een bad voor het chemisch verkoperen. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3823680A JPS56136967A (en) | 1980-03-27 | 1980-03-27 | Method and apparatus for deionizing chemical copper plating bath |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56136967A true JPS56136967A (en) | 1981-10-26 |
| JPS6225749B2 JPS6225749B2 (enrdf_load_stackoverflow) | 1987-06-04 |
Family
ID=12519657
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3823680A Granted JPS56136967A (en) | 1979-06-19 | 1980-03-27 | Method and apparatus for deionizing chemical copper plating bath |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56136967A (enrdf_load_stackoverflow) |
-
1980
- 1980-03-27 JP JP3823680A patent/JPS56136967A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6225749B2 (enrdf_load_stackoverflow) | 1987-06-04 |
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