JPS56136967A - Method and apparatus for deionizing chemical copper plating bath - Google Patents

Method and apparatus for deionizing chemical copper plating bath

Info

Publication number
JPS56136967A
JPS56136967A JP3823680A JP3823680A JPS56136967A JP S56136967 A JPS56136967 A JP S56136967A JP 3823680 A JP3823680 A JP 3823680A JP 3823680 A JP3823680 A JP 3823680A JP S56136967 A JPS56136967 A JP S56136967A
Authority
JP
Japan
Prior art keywords
vessel
bath
ions
plating
acid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3823680A
Other languages
Japanese (ja)
Other versions
JPS6225749B2 (en
Inventor
Hiroshi Kikuchi
Hitoshi Oka
Ataru Yokono
Haruo Suzuki
Toyofusa Yoshimura
Akira Matsuo
Tokio Isogai
Osamu Miyazawa
Isamu Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3823680A priority Critical patent/JPS56136967A/en
Priority to US06/160,201 priority patent/US4324629A/en
Priority to NLAANVRAGE8003553,A priority patent/NL188683C/en
Priority to DE3022962A priority patent/DE3022962C2/en
Publication of JPS56136967A publication Critical patent/JPS56136967A/en
Publication of JPS6225749B2 publication Critical patent/JPS6225749B2/ja
Granted legal-status Critical Current

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  • Chemically Coating (AREA)

Abstract

PURPOSE: To regenerate an worn-out chemical copper plating bath and prevent the deterioration of a plated film in the mechanical properties by electrodialyzing the bath with deteriorated performance after pH adjustment.
CONSTITUTION: When a chemical copper plating bath made of aqueous soln. contg. Cu ions, a Cu ion reducing agent, a chelating agent and alkali metal hydroxide is used in plating and deteriorated in the plating power, it is poured into pH adjusting vessel 5 from plating vessel 1. By adding one or more kinds of acids such as sulfuric acid, perchloric acid, formic acid and acetic acid to vessel 5 from acid vessel 6, the bath is adjusted to 2W8pH to release carbonate ions as gaseous CO2. It is then adjusted to 8W11pH and fed to desalting chamber 2 of electrodialytic vessel 1 to remove HCO3 -, Na+ and other ions. The harmful ions discharged and accumulated in concn. chamber 3 of vessel 1 are refluxed to concd. soln. vessel 7. Thus, said plating bath is regenerated.
COPYRIGHT: (C)1981,JPO&Japio
JP3823680A 1979-06-19 1980-03-27 Method and apparatus for deionizing chemical copper plating bath Granted JPS56136967A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP3823680A JPS56136967A (en) 1980-03-27 1980-03-27 Method and apparatus for deionizing chemical copper plating bath
US06/160,201 US4324629A (en) 1979-06-19 1980-06-17 Process for regenerating chemical copper plating solution
NLAANVRAGE8003553,A NL188683C (en) 1979-06-19 1980-06-19 METHOD FOR REGENERATING A BATH FOR CHEMICAL COPYING.
DE3022962A DE3022962C2 (en) 1979-06-19 1980-06-19 Process for regenerating a chemical copper plating solution

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3823680A JPS56136967A (en) 1980-03-27 1980-03-27 Method and apparatus for deionizing chemical copper plating bath

Publications (2)

Publication Number Publication Date
JPS56136967A true JPS56136967A (en) 1981-10-26
JPS6225749B2 JPS6225749B2 (en) 1987-06-04

Family

ID=12519657

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3823680A Granted JPS56136967A (en) 1979-06-19 1980-03-27 Method and apparatus for deionizing chemical copper plating bath

Country Status (1)

Country Link
JP (1) JPS56136967A (en)

Also Published As

Publication number Publication date
JPS6225749B2 (en) 1987-06-04

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