JPS56133455A - Method for reducing amount of chemical copper plating solution - Google Patents
Method for reducing amount of chemical copper plating solutionInfo
- Publication number
- JPS56133455A JPS56133455A JP3625780A JP3625780A JPS56133455A JP S56133455 A JPS56133455 A JP S56133455A JP 3625780 A JP3625780 A JP 3625780A JP 3625780 A JP3625780 A JP 3625780A JP S56133455 A JPS56133455 A JP S56133455A
- Authority
- JP
- Japan
- Prior art keywords
- soln
- tank
- copper plating
- chemical copper
- amount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To prevent the increase in amount of solution without impairing a chemical copper plating solution by passing the plating soln. which has been increased in soln. amount by being replenished with the consumed component of the chemical copper plating soln. as a soln. through an ion exchange membrane thereby removing the water content together with harmful components.
CONSTITUTION: The replenishment of the consumed component of a chemical copper plating soln. is accomplished by an automatic control apparatus 6 which automatically analyzes the plating soln. concn. in a tank 1 and outputs the difference thereof. The replenishing components for the insufficient portion are automatically replenished as a soln. by opening and closing the solenoid valves 7W8 of replenishing tanks 2W5. The chemical copper plating soln. increased in soln. amount by the replenishing soln. is supplied to the desalted water in an electrodialysis tank 11. The water past the ion exchange membrane in the tank 11 moves together with harmful ions into a concentrating chamber, where dehydration is accomplished. Then the plating soln. contg. effective components is returned into the tank 1. The concd. soln. having temporarily stored in a concd. soln. tank 12 is disused after it has been subjected to the treatment of lowering the concn. of effective components.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3625780A JPS56133455A (en) | 1980-03-24 | 1980-03-24 | Method for reducing amount of chemical copper plating solution |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3625780A JPS56133455A (en) | 1980-03-24 | 1980-03-24 | Method for reducing amount of chemical copper plating solution |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56133455A true JPS56133455A (en) | 1981-10-19 |
JPS6411715B2 JPS6411715B2 (en) | 1989-02-27 |
Family
ID=12464714
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3625780A Granted JPS56133455A (en) | 1980-03-24 | 1980-03-24 | Method for reducing amount of chemical copper plating solution |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56133455A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05306471A (en) * | 1991-05-17 | 1993-11-19 | Hitachi Kasei Techno Plant Kk | Method and device for forming copper electroless plating solution |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6120629A (en) * | 1984-07-09 | 1986-01-29 | Hitachi Ltd | Burring method |
-
1980
- 1980-03-24 JP JP3625780A patent/JPS56133455A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6120629A (en) * | 1984-07-09 | 1986-01-29 | Hitachi Ltd | Burring method |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05306471A (en) * | 1991-05-17 | 1993-11-19 | Hitachi Kasei Techno Plant Kk | Method and device for forming copper electroless plating solution |
Also Published As
Publication number | Publication date |
---|---|
JPS6411715B2 (en) | 1989-02-27 |
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