JPS56135103A - Rectilinear meter - Google Patents
Rectilinear meterInfo
- Publication number
- JPS56135103A JPS56135103A JP3947680A JP3947680A JPS56135103A JP S56135103 A JPS56135103 A JP S56135103A JP 3947680 A JP3947680 A JP 3947680A JP 3947680 A JP3947680 A JP 3947680A JP S56135103 A JPS56135103 A JP S56135103A
- Authority
- JP
- Japan
- Prior art keywords
- light
- hologram
- diffusion plate
- constitution
- beam splitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/021—Interferometers using holographic techniques
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3947680A JPS56135103A (en) | 1980-03-27 | 1980-03-27 | Rectilinear meter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3947680A JPS56135103A (en) | 1980-03-27 | 1980-03-27 | Rectilinear meter |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56135103A true JPS56135103A (en) | 1981-10-22 |
JPH0140283B2 JPH0140283B2 (ja) | 1989-08-28 |
Family
ID=12554110
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3947680A Granted JPS56135103A (en) | 1980-03-27 | 1980-03-27 | Rectilinear meter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56135103A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4466693A (en) * | 1980-11-25 | 1984-08-21 | Agency Of Industrial Science And Technology | Holographic straightness meter |
-
1980
- 1980-03-27 JP JP3947680A patent/JPS56135103A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4466693A (en) * | 1980-11-25 | 1984-08-21 | Agency Of Industrial Science And Technology | Holographic straightness meter |
Also Published As
Publication number | Publication date |
---|---|
JPH0140283B2 (ja) | 1989-08-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GR3004812T3 (ja) | ||
JPS6413403A (en) | Interference length measuring apparatus | |
JPS56135103A (en) | Rectilinear meter | |
US3970358A (en) | Coherent, quasi-monochromatic light source | |
JPS5330878A (en) | Focus adjusting device in projection type exposure apparatus | |
FR2402884A1 (fr) | Dispositif de focalisation d'un rayonnement electromagnetique sur un echantillon | |
JPS5767815A (en) | Measuring method for position of reflector using light | |
JPS5317705A (en) | Automatic focusing system | |
GB1524830A (en) | Flow measurement apparatus | |
JPS56157841A (en) | Detecting apparatus for surface defect of body | |
GB1360619A (en) | Apparatus for testing beams of light | |
JPS57211504A (en) | Observation member for talbot interferometer | |
GB1502158A (en) | Lens meter | |
JPS57198804A (en) | Distance measuring apparatus | |
JPS55140102A (en) | Measuring device for flatness of inspected plane glass | |
JPS57161606A (en) | Inline homogram displacement gauge | |
JPS5250703A (en) | Optical reading device for recording materials | |
JPS55124008A (en) | Defect inspecting apparatus | |
GB570022A (en) | A projection system for the inspection of internal surfaces | |
JPS5444579A (en) | Vibration measuring method by pulse laser holography | |
JPS5622902A (en) | Measuring method for thickness of transparent plate | |
JPS5749804A (en) | Method and apparatus for measuring length | |
JPS57153206A (en) | Light interference measuring device | |
JPS5722892A (en) | Laser working apparatus | |
JPS56143545A (en) | Optical reproducing device |