JPS56134783A - Manufacture of solid state picture pickup element - Google Patents
Manufacture of solid state picture pickup elementInfo
- Publication number
- JPS56134783A JPS56134783A JP3746380A JP3746380A JPS56134783A JP S56134783 A JPS56134783 A JP S56134783A JP 3746380 A JP3746380 A JP 3746380A JP 3746380 A JP3746380 A JP 3746380A JP S56134783 A JPS56134783 A JP S56134783A
- Authority
- JP
- Japan
- Prior art keywords
- photoelectric conversion
- scanning
- region
- pickup element
- decked
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000007787 solid Substances 0.000 title 1
- 238000006243 chemical reaction Methods 0.000 abstract 5
- 239000000758 substrate Substances 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 238000010276 construction Methods 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 238000012216 screening Methods 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14665—Imagers using a photoconductor layer
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Light Receiving Elements (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55037463A JPS5928065B2 (ja) | 1980-03-26 | 1980-03-26 | 固体撮像素子の製造方法 |
EP81301283A EP0037244B1 (en) | 1980-03-26 | 1981-03-25 | Method for fabricating a solid-state imaging device using photoconductive film |
DE8181301283T DE3171772D1 (en) | 1980-03-26 | 1981-03-25 | Method for fabricating a solid-state imaging device using photoconductive film |
US06/247,737 US4364973A (en) | 1980-03-26 | 1981-03-26 | Method for fabricating a solid-state imaging device using photoconductive film |
CA000373948A CA1153091A (en) | 1980-03-26 | 1981-03-26 | Method for fabricating a solid-state imaging device using photoconductive film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55037463A JPS5928065B2 (ja) | 1980-03-26 | 1980-03-26 | 固体撮像素子の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56134783A true JPS56134783A (en) | 1981-10-21 |
JPS5928065B2 JPS5928065B2 (ja) | 1984-07-10 |
Family
ID=12498211
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55037463A Expired JPS5928065B2 (ja) | 1980-03-26 | 1980-03-26 | 固体撮像素子の製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US4364973A (ja) |
EP (1) | EP0037244B1 (ja) |
JP (1) | JPS5928065B2 (ja) |
CA (1) | CA1153091A (ja) |
DE (1) | DE3171772D1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4471371A (en) * | 1981-01-06 | 1984-09-11 | Fuji Xerox Co., Ltd. | Thin film image pickup element |
DE3544182A1 (de) * | 1985-12-13 | 1987-06-19 | Heimann Gmbh | Kontaktbildsensorzeile |
KR930007532B1 (ko) * | 1990-07-12 | 1993-08-12 | 금성일렉트론 주식회사 | Soi 구조를 이용한 3차원 ccd 영상소자 및 그 제조방법 |
JP4419264B2 (ja) * | 2000-03-31 | 2010-02-24 | ソニー株式会社 | 固体撮像装置 |
US6255134B1 (en) * | 2000-04-24 | 2001-07-03 | Pulnix America, Inc. | Method for making high-frame-rate CCD imaging devices from otherwise ordinary and inexpensive CCD devices |
KR100630679B1 (ko) * | 2003-12-17 | 2006-10-02 | 삼성전자주식회사 | 포토 다이오드 및 이의 제조 방법 |
JP4130211B2 (ja) * | 2006-05-31 | 2008-08-06 | 三洋電機株式会社 | 撮像装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5293285A (en) * | 1976-02-02 | 1977-08-05 | Hitachi Ltd | Structure for semiconductor device |
JPS52144992A (en) * | 1976-05-28 | 1977-12-02 | Hitachi Ltd | Light receiving element |
FR2433871A1 (fr) * | 1978-08-18 | 1980-03-14 | Hitachi Ltd | Dispositif de formation d'image a semi-conducteur |
US4181755A (en) * | 1978-11-21 | 1980-01-01 | Rca Corporation | Thin film pattern generation by an inverse self-lifting technique |
-
1980
- 1980-03-26 JP JP55037463A patent/JPS5928065B2/ja not_active Expired
-
1981
- 1981-03-25 DE DE8181301283T patent/DE3171772D1/de not_active Expired
- 1981-03-25 EP EP81301283A patent/EP0037244B1/en not_active Expired
- 1981-03-26 US US06/247,737 patent/US4364973A/en not_active Expired - Lifetime
- 1981-03-26 CA CA000373948A patent/CA1153091A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
EP0037244B1 (en) | 1985-08-14 |
CA1153091A (en) | 1983-08-30 |
US4364973A (en) | 1982-12-21 |
EP0037244A2 (en) | 1981-10-07 |
EP0037244A3 (en) | 1982-09-08 |
DE3171772D1 (en) | 1985-09-19 |
JPS5928065B2 (ja) | 1984-07-10 |
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