JPS56129379A - Solid image-pickup element and manufacture - Google Patents

Solid image-pickup element and manufacture

Info

Publication number
JPS56129379A
JPS56129379A JP3181280A JP3181280A JPS56129379A JP S56129379 A JPS56129379 A JP S56129379A JP 3181280 A JP3181280 A JP 3181280A JP 3181280 A JP3181280 A JP 3181280A JP S56129379 A JPS56129379 A JP S56129379A
Authority
JP
Japan
Prior art keywords
gas
substrate
conduit
oxygen
solid image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3181280A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6322075B2 (enExample
Inventor
Shinichiro Ishihara
Tsuneo Tanaka
Seiichi Nagata
Koshiro Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP3181280A priority Critical patent/JPS56129379A/ja
Priority to EP81100992A priority patent/EP0035146B1/en
Priority to DE8181100992T priority patent/DE3176910D1/de
Publication of JPS56129379A publication Critical patent/JPS56129379A/ja
Publication of JPS6322075B2 publication Critical patent/JPS6322075B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/10—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices being sensitive to infrared radiation, visible or ultraviolet radiation, and having no potential barriers, e.g. photoresistors
    • H10F30/15—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices being sensitive to infrared radiation, visible or ultraviolet radiation, and having no potential barriers, e.g. photoresistors comprising amorphous semiconductors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/10—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material
    • H10F71/103—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material including only Group IV materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Light Receiving Elements (AREA)
  • Solid State Image Pick-Up Elements (AREA)
JP3181280A 1980-02-15 1980-03-12 Solid image-pickup element and manufacture Granted JPS56129379A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP3181280A JPS56129379A (en) 1980-03-12 1980-03-12 Solid image-pickup element and manufacture
EP81100992A EP0035146B1 (en) 1980-02-15 1981-02-12 Semiconductor photoelectric device
DE8181100992T DE3176910D1 (en) 1980-02-15 1981-02-12 Semiconductor photoelectric device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3181280A JPS56129379A (en) 1980-03-12 1980-03-12 Solid image-pickup element and manufacture

Publications (2)

Publication Number Publication Date
JPS56129379A true JPS56129379A (en) 1981-10-09
JPS6322075B2 JPS6322075B2 (enExample) 1988-05-10

Family

ID=12341495

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3181280A Granted JPS56129379A (en) 1980-02-15 1980-03-12 Solid image-pickup element and manufacture

Country Status (1)

Country Link
JP (1) JPS56129379A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58180055A (ja) * 1981-11-26 1983-10-21 Seiko Epson Corp イメ−ジセンサ

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5110715A (enExample) * 1974-07-05 1976-01-28 Hitachi Ltd
JPS51113481A (en) * 1975-03-28 1976-10-06 Sony Corp Semiconductor device
JPS54103630A (en) * 1978-02-01 1979-08-15 Matsushita Electric Ind Co Ltd Solid state pickup device
JPS54149489A (en) * 1978-05-16 1979-11-22 Matsushita Electric Ind Co Ltd Thin film solar battery

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5110715A (enExample) * 1974-07-05 1976-01-28 Hitachi Ltd
JPS51113481A (en) * 1975-03-28 1976-10-06 Sony Corp Semiconductor device
JPS54103630A (en) * 1978-02-01 1979-08-15 Matsushita Electric Ind Co Ltd Solid state pickup device
JPS54149489A (en) * 1978-05-16 1979-11-22 Matsushita Electric Ind Co Ltd Thin film solar battery

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58180055A (ja) * 1981-11-26 1983-10-21 Seiko Epson Corp イメ−ジセンサ

Also Published As

Publication number Publication date
JPS6322075B2 (enExample) 1988-05-10

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