JPS56122162A - Semiconductor device and manufacture thereof - Google Patents
Semiconductor device and manufacture thereofInfo
- Publication number
- JPS56122162A JPS56122162A JP2641080A JP2641080A JPS56122162A JP S56122162 A JPS56122162 A JP S56122162A JP 2641080 A JP2641080 A JP 2641080A JP 2641080 A JP2641080 A JP 2641080A JP S56122162 A JPS56122162 A JP S56122162A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- diffused layer
- emitter
- base
- diffused
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE:To improve the yield of manufacturing a semiconductor device by forming pickup electrode through oxidation resistant films on the surface of base, emitter and collector diffused layers, thereby eliminating the step of forming contact holes therefor. CONSTITUTION:An N type conductivity type emitter diffused layer 15 is formed on a predetermined region of a base diffused layer 13 in a predetermined diffusion depth from the surface. An oxide film 16 is so formed on the surface of an epitaxial growth layer 12 as to insulate and isolate the base diffused layer 13, the emitter diffused layer 15 and the collector diffused layer 14. Pickup electrodes 18 are formed through oxidation resistant layer 17 having conductivity on the surfaces of the layers 13, 14 and 15. The oxide film 17 is formed of conductive metal (such as W, Mo, V, and Ti) and silicon carbide. Reference numeral 10 in the drawing represents a P-type conductivity type semiconductor substrate, and 11 represents a buried layer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55026410A JPS6030111B2 (en) | 1980-03-03 | 1980-03-03 | semiconductor equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55026410A JPS6030111B2 (en) | 1980-03-03 | 1980-03-03 | semiconductor equipment |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18411284A Division JPS6074476A (en) | 1984-09-03 | 1984-09-03 | Manufacture of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56122162A true JPS56122162A (en) | 1981-09-25 |
JPS6030111B2 JPS6030111B2 (en) | 1985-07-15 |
Family
ID=12192774
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55026410A Expired JPS6030111B2 (en) | 1980-03-03 | 1980-03-03 | semiconductor equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6030111B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5893261A (en) * | 1981-11-30 | 1983-06-02 | Toshiba Corp | Manufacture of semiconductor device |
-
1980
- 1980-03-03 JP JP55026410A patent/JPS6030111B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5893261A (en) * | 1981-11-30 | 1983-06-02 | Toshiba Corp | Manufacture of semiconductor device |
JPH0570301B2 (en) * | 1981-11-30 | 1993-10-04 | Tokyo Shibaura Electric Co |
Also Published As
Publication number | Publication date |
---|---|
JPS6030111B2 (en) | 1985-07-15 |
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