JPS56116037A - Manufacture of electrophotographic receptor - Google Patents

Manufacture of electrophotographic receptor

Info

Publication number
JPS56116037A
JPS56116037A JP1940780A JP1940780A JPS56116037A JP S56116037 A JPS56116037 A JP S56116037A JP 1940780 A JP1940780 A JP 1940780A JP 1940780 A JP1940780 A JP 1940780A JP S56116037 A JPS56116037 A JP S56116037A
Authority
JP
Japan
Prior art keywords
gas
amorphous silicon
glow discharge
torr
grow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1940780A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6161387B2 (enrdf_load_stackoverflow
Inventor
Nobuyoshi Takagi
Kiyoshi Ozawa
Toshiro Kodama
Satoru Kawai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1940780A priority Critical patent/JPS56116037A/ja
Publication of JPS56116037A publication Critical patent/JPS56116037A/ja
Publication of JPS6161387B2 publication Critical patent/JPS6161387B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
    • G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited
    • G03G5/08214—Silicon-based
    • G03G5/08278—Depositing methods

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photoreceptors In Electrophotography (AREA)
JP1940780A 1980-02-19 1980-02-19 Manufacture of electrophotographic receptor Granted JPS56116037A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1940780A JPS56116037A (en) 1980-02-19 1980-02-19 Manufacture of electrophotographic receptor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1940780A JPS56116037A (en) 1980-02-19 1980-02-19 Manufacture of electrophotographic receptor

Publications (2)

Publication Number Publication Date
JPS56116037A true JPS56116037A (en) 1981-09-11
JPS6161387B2 JPS6161387B2 (enrdf_load_stackoverflow) 1986-12-25

Family

ID=11998396

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1940780A Granted JPS56116037A (en) 1980-02-19 1980-02-19 Manufacture of electrophotographic receptor

Country Status (1)

Country Link
JP (1) JPS56116037A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58189643A (ja) * 1982-03-31 1983-11-05 Minolta Camera Co Ltd 感光体
FR2551229A1 (fr) * 1983-08-26 1985-03-01 Canon Kk Element photoconducteur pour electrophotographie
JPS6075841A (ja) * 1983-09-13 1985-04-30 Canon Inc 光導電部材
US4540647A (en) * 1984-08-20 1985-09-10 Eastman Kodak Company Method for the manufacture of photoconductive insulating elements with a broad dynamic exposure range
JPS63155054A (ja) * 1986-12-18 1988-06-28 Kyocera Corp 電子写真感光体の製法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58189643A (ja) * 1982-03-31 1983-11-05 Minolta Camera Co Ltd 感光体
US4451546A (en) * 1982-03-31 1984-05-29 Minolta Camera Kabushiki Kaisha Photosensitive member
FR2551229A1 (fr) * 1983-08-26 1985-03-01 Canon Kk Element photoconducteur pour electrophotographie
JPS6075841A (ja) * 1983-09-13 1985-04-30 Canon Inc 光導電部材
US4540647A (en) * 1984-08-20 1985-09-10 Eastman Kodak Company Method for the manufacture of photoconductive insulating elements with a broad dynamic exposure range
JPS63155054A (ja) * 1986-12-18 1988-06-28 Kyocera Corp 電子写真感光体の製法

Also Published As

Publication number Publication date
JPS6161387B2 (enrdf_load_stackoverflow) 1986-12-25

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