JPS56116036A - Manufacture of electrophotographic receptor - Google Patents

Manufacture of electrophotographic receptor

Info

Publication number
JPS56116036A
JPS56116036A JP1940680A JP1940680A JPS56116036A JP S56116036 A JPS56116036 A JP S56116036A JP 1940680 A JP1940680 A JP 1940680A JP 1940680 A JP1940680 A JP 1940680A JP S56116036 A JPS56116036 A JP S56116036A
Authority
JP
Japan
Prior art keywords
substrate
gas
amorphous silicon
layer
silane gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1940680A
Other languages
Japanese (ja)
Other versions
JPS6161386B2 (en
Inventor
Nobuyoshi Takagi
Kiyoshi Ozawa
Toshiro Kodama
Satoru Kawai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1940680A priority Critical patent/JPS56116036A/en
Publication of JPS56116036A publication Critical patent/JPS56116036A/en
Publication of JPS6161386B2 publication Critical patent/JPS6161386B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
    • G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited
    • G03G5/08214—Silicon-based
    • G03G5/08278—Depositing methods

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photoreceptors In Electrophotography (AREA)

Abstract

PURPOSE:To improve an amorphous silicon layer and to prepare the titled photoreceptor of high sensitivity, by subjecting a conductive substrate to glow discharge in a gas containing silane gas at a specified ratio. CONSTITUTION:A conductive substrate is placed in a gas consisting of 0.5-6mol% oxygen and silane gas amounting to all the rest, and kept in 10<-1>-10<-3> Torr, the substrate is heated to 80-130 deg.C, and the first photosensitive layer of amorphous silicon is formed on the substrate surface by glow discharging. The substrate is heated to 200-250 deg.C and allowed to stand for the given time to conduct heat treatment. Then, the substrate kept at 200-250 deg.C is placed in the gas consisting of 0-0.1mol% oxygen and silane gas of the rest in 10<-1>-10<-3> Torr, and subjected to glow discharge to grow the second amorphous silicon layer on the first layer, thus permitting the photoreceptor to have characteristics lowering charge in accordance with very weak light of long wavelengths, and to be suitable for a high speed laser printer.
JP1940680A 1980-02-19 1980-02-19 Manufacture of electrophotographic receptor Granted JPS56116036A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1940680A JPS56116036A (en) 1980-02-19 1980-02-19 Manufacture of electrophotographic receptor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1940680A JPS56116036A (en) 1980-02-19 1980-02-19 Manufacture of electrophotographic receptor

Publications (2)

Publication Number Publication Date
JPS56116036A true JPS56116036A (en) 1981-09-11
JPS6161386B2 JPS6161386B2 (en) 1986-12-25

Family

ID=11998369

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1940680A Granted JPS56116036A (en) 1980-02-19 1980-02-19 Manufacture of electrophotographic receptor

Country Status (1)

Country Link
JP (1) JPS56116036A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56161551A (en) * 1980-05-16 1981-12-11 Canon Inc Image forming member for electrophotography
US4835507A (en) * 1985-12-06 1989-05-30 Canon Kabushiki Kaisha Photosensor array for image processing apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56161551A (en) * 1980-05-16 1981-12-11 Canon Inc Image forming member for electrophotography
JPS6161388B2 (en) * 1980-05-16 1986-12-25 Canon Kk
US4835507A (en) * 1985-12-06 1989-05-30 Canon Kabushiki Kaisha Photosensor array for image processing apparatus

Also Published As

Publication number Publication date
JPS6161386B2 (en) 1986-12-25

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