JPS56104795A - Device for pulling up crystal - Google Patents
Device for pulling up crystalInfo
- Publication number
- JPS56104795A JPS56104795A JP857680A JP857680A JPS56104795A JP S56104795 A JPS56104795 A JP S56104795A JP 857680 A JP857680 A JP 857680A JP 857680 A JP857680 A JP 857680A JP S56104795 A JPS56104795 A JP S56104795A
- Authority
- JP
- Japan
- Prior art keywords
- vessel
- heating
- single crystal
- pulling
- heating elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: When a single crystal is formed by the pulling-up method under application of magnetic field, a plurality of heaters are used as a heating means and each of them is controlled independently to form a single crystal of really round cross section and good quality without rotation of the single cyrstal pulled up.
CONSTITUTION: In a device for pulling up a single crystal that is composed of a vessel 2 including a melted liquid to be crystallized such as melted silicon 3, a heating means 4, jacket 6 and a means for generating a direct current magnetic field 7 which are fitted outside the vessel 2, the heating means 4 contains a plurality of heating elements 51, 52,...58, which are arranged at an equal interval on the circumference around the axis of the vessel 2. In the meantime, thermocouples 11W 18 are provided on the positions corresponding to the above heating elements 51W 58 respectively in the vessel 2. Each thermocouple detects a temperature and the current to each heating element is controlled according to the detected temperature so that the center of heating by these heating elements always comes on the center axis of the vessel when a single crystal is grown by pulling up.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (12)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP857680A JPS56104795A (en) | 1980-01-28 | 1980-01-28 | Device for pulling up crystal |
GB8029356A GB2059932B (en) | 1979-09-20 | 1980-09-11 | Solidification processes |
FR8019942A FR2465802B1 (en) | 1979-09-20 | 1980-09-16 | PROCESS FOR SOLIDIFYING A FLUID SUCH AS A SILICON BATH AND PROCESS OBTAINED |
DE19803035267 DE3035267A1 (en) | 1979-09-20 | 1980-09-18 | METHOD FOR STRENGTHENING LIQUID MATERIALS |
IT24803/80A IT1141064B (en) | 1979-09-20 | 1980-09-19 | SOLIDIFICATION PROCESS |
NL8005228A NL8005228A (en) | 1979-09-20 | 1980-09-19 | METHOD FOR PROCESSING THE TRANSITION IN FIXED STATE. |
SU2992247A SU1258329A3 (en) | 1979-09-20 | 1980-09-19 | Method of growing silicon crystals |
CA000360638A CA1177367A (en) | 1979-09-20 | 1980-09-19 | Process for solidification |
SE8006569A SE8006569L (en) | 1979-09-20 | 1980-09-19 | STELNINGSFORFARANDE |
AT0473180A AT398582B (en) | 1979-09-20 | 1980-09-22 | CRYSTAL GROWING METHOD |
US06/339,065 US4619730A (en) | 1979-09-20 | 1982-01-13 | Process for solidification in a magnetic field with a D.C. heater |
US06/562,015 US4622211A (en) | 1979-09-20 | 1983-12-16 | Apparatus for solidification with resistance heater and magnets |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP857680A JPS56104795A (en) | 1980-01-28 | 1980-01-28 | Device for pulling up crystal |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56104795A true JPS56104795A (en) | 1981-08-20 |
JPS6121195B2 JPS6121195B2 (en) | 1986-05-26 |
Family
ID=11696852
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP857680A Granted JPS56104795A (en) | 1979-09-20 | 1980-01-28 | Device for pulling up crystal |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56104795A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5983977U (en) * | 1982-11-26 | 1984-06-06 | 日本電信電話株式会社 | crystal manufacturing equipment |
JPS6470998A (en) * | 1987-09-10 | 1989-03-16 | Nec Corp | Decision circuit for use of redundant memory cell |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53113339A (en) * | 1977-03-14 | 1978-10-03 | Kokusai Electric Co Ltd | Heater for fusing semiconductor or metal |
JPS5480284A (en) * | 1977-12-01 | 1979-06-26 | Wacker Chemitronic | Method of manufacturing high purity semiconductor material and high purity metal |
-
1980
- 1980-01-28 JP JP857680A patent/JPS56104795A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53113339A (en) * | 1977-03-14 | 1978-10-03 | Kokusai Electric Co Ltd | Heater for fusing semiconductor or metal |
JPS5480284A (en) * | 1977-12-01 | 1979-06-26 | Wacker Chemitronic | Method of manufacturing high purity semiconductor material and high purity metal |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5983977U (en) * | 1982-11-26 | 1984-06-06 | 日本電信電話株式会社 | crystal manufacturing equipment |
JPS6470998A (en) * | 1987-09-10 | 1989-03-16 | Nec Corp | Decision circuit for use of redundant memory cell |
Also Published As
Publication number | Publication date |
---|---|
JPS6121195B2 (en) | 1986-05-26 |
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