JPS56104792A - Uniform doping to semiconductor crystal of compound containing volatile component - Google Patents
Uniform doping to semiconductor crystal of compound containing volatile componentInfo
- Publication number
- JPS56104792A JPS56104792A JP809080A JP809080A JPS56104792A JP S56104792 A JPS56104792 A JP S56104792A JP 809080 A JP809080 A JP 809080A JP 809080 A JP809080 A JP 809080A JP S56104792 A JPS56104792 A JP S56104792A
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- boat
- gaas
- zone
- uniformly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 title abstract 10
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 150000001875 compounds Chemical class 0.000 title 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 abstract 4
- 239000011651 chromium Substances 0.000 abstract 4
- 238000002844 melting Methods 0.000 abstract 3
- 230000008018 melting Effects 0.000 abstract 3
- 229910052804 chromium Inorganic materials 0.000 abstract 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 abstract 1
- 238000002425 crystallisation Methods 0.000 abstract 1
- 230000008025 crystallization Effects 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000010453 quartz Substances 0.000 abstract 1
- 239000002994 raw material Substances 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- 238000004857 zone melting Methods 0.000 abstract 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP809080A JPS56104792A (en) | 1980-01-26 | 1980-01-26 | Uniform doping to semiconductor crystal of compound containing volatile component |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP809080A JPS56104792A (en) | 1980-01-26 | 1980-01-26 | Uniform doping to semiconductor crystal of compound containing volatile component |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS56104792A true JPS56104792A (en) | 1981-08-20 |
Family
ID=11683620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP809080A Pending JPS56104792A (en) | 1980-01-26 | 1980-01-26 | Uniform doping to semiconductor crystal of compound containing volatile component |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56104792A (ja) |
-
1980
- 1980-01-26 JP JP809080A patent/JPS56104792A/ja active Pending
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