JPS5585028A - Mark detecting signal amplifier - Google Patents

Mark detecting signal amplifier

Info

Publication number
JPS5585028A
JPS5585028A JP15741778A JP15741778A JPS5585028A JP S5585028 A JPS5585028 A JP S5585028A JP 15741778 A JP15741778 A JP 15741778A JP 15741778 A JP15741778 A JP 15741778A JP S5585028 A JPS5585028 A JP S5585028A
Authority
JP
Japan
Prior art keywords
mark
signal
detecting
maximum
detecting signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15741778A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5653851B2 (enExample
Inventor
Nobuo Hamamoto
Kanji Ozawa
Kazuo Ichino
Shigeru Moriya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Hitachi Ltd
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Nippon Telegraph and Telephone Corp filed Critical Hitachi Ltd
Priority to JP15741778A priority Critical patent/JPS5585028A/ja
Priority to GB7937900A priority patent/GB2041706B/en
Priority to CA000339489A priority patent/CA1137633A/en
Priority to FR7929362A priority patent/FR2445067A1/fr
Priority to NL7909004A priority patent/NL7909004A/nl
Priority to DE2951216A priority patent/DE2951216C2/de
Priority to US06/107,087 priority patent/US4297676A/en
Publication of JPS5585028A publication Critical patent/JPS5585028A/ja
Publication of JPS5653851B2 publication Critical patent/JPS5653851B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
    • G06K7/10—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
    • G06K7/10544—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum
    • G06K7/10821—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum further details of bar or optical code scanning devices
    • G06K7/10851—Circuits for pulse shaping, amplifying, eliminating noise signals, checking the function of the sensing device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Artificial Intelligence (AREA)
  • Toxicology (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP15741778A 1978-12-22 1978-12-22 Mark detecting signal amplifier Granted JPS5585028A (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP15741778A JPS5585028A (en) 1978-12-22 1978-12-22 Mark detecting signal amplifier
GB7937900A GB2041706B (en) 1978-12-22 1979-11-01 Mark signal amplifier
CA000339489A CA1137633A (en) 1978-12-22 1979-11-08 Mark signal amplifier
FR7929362A FR2445067A1 (fr) 1978-12-22 1979-11-29 Amplificateur de signaux de marque
NL7909004A NL7909004A (nl) 1978-12-22 1979-12-13 Merksignaalversterker.
DE2951216A DE2951216C2 (de) 1978-12-22 1979-12-19 Schaltungsanordnung zur genauen Untersuchung eines zwei Amplitudenwerte annehmenden elektrischen Signals
US06/107,087 US4297676A (en) 1978-12-22 1979-12-26 Mark signal amplifier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15741778A JPS5585028A (en) 1978-12-22 1978-12-22 Mark detecting signal amplifier

Publications (2)

Publication Number Publication Date
JPS5585028A true JPS5585028A (en) 1980-06-26
JPS5653851B2 JPS5653851B2 (enExample) 1981-12-22

Family

ID=15649171

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15741778A Granted JPS5585028A (en) 1978-12-22 1978-12-22 Mark detecting signal amplifier

Country Status (7)

Country Link
US (1) US4297676A (enExample)
JP (1) JPS5585028A (enExample)
CA (1) CA1137633A (enExample)
DE (1) DE2951216C2 (enExample)
FR (1) FR2445067A1 (enExample)
GB (1) GB2041706B (enExample)
NL (1) NL7909004A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5795628A (en) * 1980-12-05 1982-06-14 Nippon Telegr & Teleph Corp <Ntt> Electron beam exposure device
JPS58114424A (ja) * 1981-12-28 1983-07-07 Fujitsu Ltd 走査形電子ビ−ム露光装置における位置合せ方式
JPS58129636U (ja) * 1982-02-24 1983-09-02 日本電子株式会社 電子ビ−ム露光におけるマ−ク検出装置
JPS59125623A (ja) * 1982-12-27 1984-07-20 Fujitsu Ltd 電子ビ−ム露光装置

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6028182B2 (ja) * 1979-10-06 1985-07-03 ミノルタ株式会社 画像読取装置
JPS6058793B2 (ja) * 1980-03-24 1985-12-21 日電アネルバ株式会社 プラズマ分光監視装置
US4525747A (en) * 1981-08-06 1985-06-25 Toshiyuki Sakai Analog-to-digital image signal conversion
US4410427A (en) * 1981-11-02 1983-10-18 Donaldson Company, Inc. Fluid filtering device
US4459475A (en) * 1982-03-29 1984-07-10 Bell & Howell Company Automatic calibration for D.C. transducers
JPS5940326A (ja) * 1982-08-30 1984-03-06 Hitachi Ltd デイスク再生装置
FR2537803B1 (fr) * 1982-12-14 1987-12-11 Thomson Csf Procede et circuit de mise en forme des signaux de sortie d'un capteur magnetique de rotation
US4633327A (en) * 1983-11-10 1986-12-30 Xerox Corporation Enhancement halftoning
US4860374A (en) * 1984-04-19 1989-08-22 Nikon Corporation Apparatus for detecting position of reference pattern
JPS61214385A (ja) * 1985-03-20 1986-09-24 日本電信電話株式会社 ばね式ケ−ブル押込切断工具
US4803644A (en) * 1985-09-20 1989-02-07 Hughes Aircraft Company Alignment mark detector for electron beam lithography
FR2605160A1 (fr) * 1986-10-01 1988-04-15 Jaeger Procede de mise en forme de signaux electriques, en particulier de signaux provenant de capteurs pour vehicules automobiles, et circuit mettant en oeuvre le procede
JPS63113776A (ja) * 1986-10-31 1988-05-18 Seiko Instr & Electronics Ltd 画像の最大値，最小値変換回路
US4876656A (en) * 1987-08-28 1989-10-24 Motorola Inc. Circuit location sensor for component placement apparatus
DE3933801A1 (de) * 1989-10-10 1991-04-18 Philips Patentverwaltung Adaptive vorrichtung zur identifikation eines periodischen signals
US5193690A (en) * 1991-06-06 1993-03-16 Western Litho Plate & Supply Co. Method of and apparatus for automatically inspecting an exposed and bent lithographic plate
US5440648A (en) * 1991-11-19 1995-08-08 Dalsa, Inc. High speed defect detection apparatus having defect detection circuits mounted in the camera housing
US5621813A (en) * 1993-01-14 1997-04-15 Ultratech Stepper, Inc. Pattern recognition alignment system
JP2826452B2 (ja) * 1993-10-25 1998-11-18 日立電子株式会社 波形記憶装置
TWI240849B (en) * 2000-02-10 2005-10-01 Asml Netherlands Bv Object positioning method for a lithographic projection apparatus
US8756648B2 (en) * 2008-09-08 2014-06-17 Telefonaktiebolaget Lm Ericsson (Publ) Provision of marked data content to user devices of a communications network

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5319763A (en) * 1976-08-09 1978-02-23 Nippon Telegr & Teleph Corp <Ntt> Mark detector in electron beam exposure

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3159815A (en) * 1961-11-29 1964-12-01 Ibm Digitalization system for multi-track optical character sensing
US3225213A (en) * 1962-05-18 1965-12-21 Beckman Instruments Inc Transition detector
US3415950A (en) * 1965-03-29 1968-12-10 Ibm Video quantizing system
US3599148A (en) * 1969-04-22 1971-08-10 Burroughs Corp Quantizing circuit correction for character recognition systems
US3599151A (en) * 1969-12-29 1971-08-10 Ibm Character recognition photosensing apparatus having a threshold comparator circuit
DE2208310C3 (de) * 1972-02-22 1982-07-29 Nixdorf Computer Ag, 4790 Paderborn Verfahren und Schaltungsanordnung zur Erzeugung einer Impulsfolge konstanter Impulsamplitude aus einer bivalenten Signalfolge veränderlicher Signalamplitude, der eine zeitlich veränderliche Gleichgröße überlagert ist
US3869698A (en) * 1973-11-29 1975-03-04 Mohawk Data Sciences Corp Optical character recognition video amplifier and digitizer
US3909594A (en) * 1973-12-26 1975-09-30 Interface Mechanisms Inc Circuit for establishing a reference voltage in bar code readers
US3875415A (en) * 1974-01-28 1975-04-01 Ibm Method and apparatus for detecting a registration mark on a target such as a semiconductor wafer
US3901814A (en) * 1974-06-27 1975-08-26 Ibm Method and apparatus for detecting a registration mark on a target such as a semiconductor wafer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5319763A (en) * 1976-08-09 1978-02-23 Nippon Telegr & Teleph Corp <Ntt> Mark detector in electron beam exposure

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5795628A (en) * 1980-12-05 1982-06-14 Nippon Telegr & Teleph Corp <Ntt> Electron beam exposure device
JPS58114424A (ja) * 1981-12-28 1983-07-07 Fujitsu Ltd 走査形電子ビ−ム露光装置における位置合せ方式
JPS58129636U (ja) * 1982-02-24 1983-09-02 日本電子株式会社 電子ビ−ム露光におけるマ−ク検出装置
JPS59125623A (ja) * 1982-12-27 1984-07-20 Fujitsu Ltd 電子ビ−ム露光装置

Also Published As

Publication number Publication date
FR2445067B1 (enExample) 1982-12-17
JPS5653851B2 (enExample) 1981-12-22
DE2951216C2 (de) 1982-06-03
US4297676A (en) 1981-10-27
GB2041706B (en) 1982-12-22
CA1137633A (en) 1982-12-14
FR2445067A1 (fr) 1980-07-18
NL7909004A (nl) 1980-06-24
GB2041706A (en) 1980-09-10
DE2951216A1 (de) 1980-08-14

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