JPS5582451A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5582451A
JPS5582451A JP15513478A JP15513478A JPS5582451A JP S5582451 A JPS5582451 A JP S5582451A JP 15513478 A JP15513478 A JP 15513478A JP 15513478 A JP15513478 A JP 15513478A JP S5582451 A JPS5582451 A JP S5582451A
Authority
JP
Japan
Prior art keywords
coated
oxide film
insulating film
layer
manufactured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15513478A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6129144B2 (enrdf_load_stackoverflow
Inventor
Takashi Yamamoto
Shinpei Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15513478A priority Critical patent/JPS5582451A/ja
Publication of JPS5582451A publication Critical patent/JPS5582451A/ja
Publication of JPS6129144B2 publication Critical patent/JPS6129144B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
  • Non-Volatile Memory (AREA)
JP15513478A 1978-12-14 1978-12-14 Manufacture of semiconductor device Granted JPS5582451A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15513478A JPS5582451A (en) 1978-12-14 1978-12-14 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15513478A JPS5582451A (en) 1978-12-14 1978-12-14 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5582451A true JPS5582451A (en) 1980-06-21
JPS6129144B2 JPS6129144B2 (enrdf_load_stackoverflow) 1986-07-04

Family

ID=15599289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15513478A Granted JPS5582451A (en) 1978-12-14 1978-12-14 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5582451A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57204174A (en) * 1981-06-09 1982-12-14 Fujitsu Ltd Manufacture of semiconductor device
JPS6052059A (ja) * 1983-08-31 1985-03-23 Toshiba Corp 半導体装置の製造方法
US5077229A (en) * 1988-10-10 1991-12-31 Eniricerche S.P.A. Monolithic chemical sensor of the chemfet type incorporating an ion-selective membrane and method of making the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57204174A (en) * 1981-06-09 1982-12-14 Fujitsu Ltd Manufacture of semiconductor device
JPS6052059A (ja) * 1983-08-31 1985-03-23 Toshiba Corp 半導体装置の製造方法
US5077229A (en) * 1988-10-10 1991-12-31 Eniricerche S.P.A. Monolithic chemical sensor of the chemfet type incorporating an ion-selective membrane and method of making the same

Also Published As

Publication number Publication date
JPS6129144B2 (enrdf_load_stackoverflow) 1986-07-04

Similar Documents

Publication Publication Date Title
JPS5457875A (en) Semiconductor nonvolatile memory device
JPS5530846A (en) Method for manufacturing fixed memory
JPS57211267A (en) Semiconductor device and manufacture thereof
JPS56161646A (en) Manufacture of semiconductor device
JPS5599744A (en) Manufacture of semiconductor device
JPS5544713A (en) Semiconductor device
JPS5582451A (en) Manufacture of semiconductor device
JPS55113335A (en) Manufacture of semiconductor device
JPS5585068A (en) Preparation of semiconductor device
JPS5585041A (en) Semiconductor device and its preparation
JPS5522811A (en) Manufacturing of semiconductor apparatus
JPS5575238A (en) Method of fabricating semiconductor device
JPS56105652A (en) Manufacture of semiconductor device
JPS54111772A (en) Manufacture for semiconductor device
JPS5559778A (en) Method of fabricating semiconductor device
JPS57102052A (en) Manufacture of semiconductor device
JPS5461490A (en) Multi-layer wiring forming method in semiconductor device
JPS57112032A (en) Formation of insulating film
JPS5552262A (en) Mos semiconductor device
JPS6411343A (en) Manufacture of semiconductor device
JPS5637679A (en) Manufacture of semiconductor device
JPS5728352A (en) Semiconductor integrated circuit and manufacture thereof
JPS57184217A (en) Manufacture of semiconductor device
JPS57167678A (en) Manufacture of semiconductor device
JPS5718362A (en) Semiconductor device and manufacture thereof