JPS5572804A - Pattern check system - Google Patents
Pattern check systemInfo
- Publication number
- JPS5572804A JPS5572804A JP14687478A JP14687478A JPS5572804A JP S5572804 A JPS5572804 A JP S5572804A JP 14687478 A JP14687478 A JP 14687478A JP 14687478 A JP14687478 A JP 14687478A JP S5572804 A JPS5572804 A JP S5572804A
- Authority
- JP
- Japan
- Prior art keywords
- light
- projector
- pattern
- inspected
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Image Processing (AREA)
- Image Analysis (AREA)
Abstract
PURPOSE: To make it possible to inspect a pattern by a simple constitution by irradiating an inspected material pattern with light from a projector while moving the light, constant pitch by constant pitch, and then by measuring the reflected light or a quantity of penetrating light.
CONSTITUTION: Laser light from light source 1 reaches light projector 5 by way of lenses 2 and 3 and mirror 4. Over projector 5, a shutter is provided which allows the light to pass for constant time and is controlled by circuit 9. Under projector 5, light irradiation window 13 which irradiates an inspected material pattern with the light is provided and inspected sample 7 is fixed on stage 6. Stage 6 moves by a fixed pitch by feed mechanism 11. On the reverse of sample 7, photo detector 8 is arranged which receives the penetrating light from projector 5 and then sends it output to decision circuit 12, where a decision on a defect of the pattern is made.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14687478A JPS5572804A (en) | 1978-11-28 | 1978-11-28 | Pattern check system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14687478A JPS5572804A (en) | 1978-11-28 | 1978-11-28 | Pattern check system |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5572804A true JPS5572804A (en) | 1980-06-02 |
Family
ID=15417510
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14687478A Pending JPS5572804A (en) | 1978-11-28 | 1978-11-28 | Pattern check system |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5572804A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5852510A (en) * | 1981-09-24 | 1983-03-28 | Toshiba Corp | Pattern defect inspecting device |
JPS5968205U (en) * | 1982-10-30 | 1984-05-09 | 住友金属鉱山株式会社 | Automatic dimension measuring device |
-
1978
- 1978-11-28 JP JP14687478A patent/JPS5572804A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5852510A (en) * | 1981-09-24 | 1983-03-28 | Toshiba Corp | Pattern defect inspecting device |
JPS5968205U (en) * | 1982-10-30 | 1984-05-09 | 住友金属鉱山株式会社 | Automatic dimension measuring device |
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