JPS5968205U - Automatic dimension measuring device - Google Patents

Automatic dimension measuring device

Info

Publication number
JPS5968205U
JPS5968205U JP16542582U JP16542582U JPS5968205U JP S5968205 U JPS5968205 U JP S5968205U JP 16542582 U JP16542582 U JP 16542582U JP 16542582 U JP16542582 U JP 16542582U JP S5968205 U JPS5968205 U JP S5968205U
Authority
JP
Japan
Prior art keywords
measured
axis
measuring device
light beam
dimension measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16542582U
Other languages
Japanese (ja)
Inventor
井出 武夫
一色 喜美雄
Original Assignee
住友金属鉱山株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 住友金属鉱山株式会社 filed Critical 住友金属鉱山株式会社
Priority to JP16542582U priority Critical patent/JPS5968205U/en
Publication of JPS5968205U publication Critical patent/JPS5968205U/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの考案による自動寸法測定装置の全体の構成
を示す斜視図、第2図はこの考案の装置により寸法を測
定することができる被測定体の一例を示す平面図、第3
図はこの考案による装置の電気的な構成を説明するため
のブロック図、第4図はこの考案による装置の姿勢検出
手段を説明するための平面図、第5図はこの考案による
装置の寸法測定動作を説明するための平面図、第6図は
この考案による自動寸法測定装置の動作を説明するため
のフローチャートである。 1:測定器本体、2:制御装置、3:架台、4:テーブ
ル受台、5:光学顕微鏡、6:テーブル、7x。 8Y、9θ:テーブル駆動手段、IIX、12Y:測尺
手段、13:光ビーム、14:光源、15:受光器、1
6:計数器、17:演算手段、18:テーブル  ′制
御手段、19:被測定体、21:プリンタ。
FIG. 1 is a perspective view showing the overall configuration of an automatic dimension measuring device according to this invention, FIG. 2 is a plan view showing an example of an object to be measured whose dimensions can be measured by the device according to this invention, and FIG.
The figure is a block diagram for explaining the electrical configuration of the device according to this invention, FIG. 4 is a plan view for explaining the attitude detection means of the device according to this invention, and FIG. 5 is a dimensional measurement of the device according to this invention. FIG. 6 is a plan view for explaining the operation, and a flowchart for explaining the operation of the automatic dimension measuring device according to this invention. 1: Measuring instrument body, 2: Control device, 3: Frame, 4: Table pedestal, 5: Optical microscope, 6: Table, 7x. 8Y, 9θ: table driving means, IIX, 12Y: measuring means, 13: light beam, 14: light source, 15: light receiver, 1
6: Counter, 17: Calculation means, 18: Table' control means, 19: Measured object, 21: Printer.

Claims (1)

【実用新案登録請求の範囲】 A 透明板によって形成されX軸、Y軸及びθ軸方向に
自由に移動できるように支持された被測定体のテーブル
と、 B このテーブルをX軸、Y軸及びθ軸方向に駆動する
駆動手段と、 C上記テーブルのX軸、Y軸及びθ軸方向の移動量を計
測する測尺手段と、 D 上記テーブルを透過する光ビームを発射する光源及
びその光ビームを受光する受光器から成る被測定体の存
在を検出する手段と、 E 上記テーブルを予め決められた順序でX軸及びY軸
方向に移動させ上記光ビームにより上記被測定体を走査
する自動走査手段と、 F この自動走査手段により上記テーブルがX軸及びY
軸方向に移動するとき上記光ビームが被測定体により遮
光される毎及び遮光状態から解放される毎に上記被測定
体の位置を取込む計数器と、 G この計数器で取込まれた被測定体の位置データによ
り被測定体の各部の寸法を算出する演算手段と、 を具備して成る自動寸法測定装置。
[Scope of Claim for Utility Model Registration] A. A table of an object to be measured formed of a transparent plate and supported so as to be freely movable in the X-axis, Y-axis, and θ-axis directions, and B. A driving means for driving in the θ-axis direction; C. A measuring means for measuring the amount of movement of the table in the X-axis, Y-axis, and θ-axis directions; D. A light source and its light beam for emitting a light beam that passes through the table. means for detecting the presence of the object to be measured, which comprises a light receiver that receives light; means, F. The automatic scanning means allows the table to be
a counter that captures the position of the object to be measured each time the light beam is blocked by the object to be measured and released from the blocking state when moving in the axial direction; An automatic dimension measuring device comprising: arithmetic means for calculating dimensions of each part of an object to be measured based on position data of the object to be measured;
JP16542582U 1982-10-30 1982-10-30 Automatic dimension measuring device Pending JPS5968205U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16542582U JPS5968205U (en) 1982-10-30 1982-10-30 Automatic dimension measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16542582U JPS5968205U (en) 1982-10-30 1982-10-30 Automatic dimension measuring device

Publications (1)

Publication Number Publication Date
JPS5968205U true JPS5968205U (en) 1984-05-09

Family

ID=30362428

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16542582U Pending JPS5968205U (en) 1982-10-30 1982-10-30 Automatic dimension measuring device

Country Status (1)

Country Link
JP (1) JPS5968205U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5572804A (en) * 1978-11-28 1980-06-02 Fujitsu Ltd Pattern check system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5572804A (en) * 1978-11-28 1980-06-02 Fujitsu Ltd Pattern check system

Similar Documents

Publication Publication Date Title
US3765764A (en) Coordinate measuring instrument
NL191216C (en) Device for checking the dimensional accuracy of a large object.
JPS5954810U (en) Dimension measuring device
JPS5968205U (en) Automatic dimension measuring device
JPS5989273U (en) Laser radar optical axis adjustment device
GB1570954A (en) Micromeasuring device
JPS58178113U (en) Laser deflection device
JP2530644Y2 (en) Circuit board inspection equipment
JPS58126438U (en) Display device in the viewfinder for distance measurement information using an autofocus device
JPS5935896U (en) Pointer illumination device
JPS5867325U (en) Projector
JPH0229454Y2 (en)
JPS5885491U (en) Optical marking processing equipment
JPS6056015U (en) distance measuring device
JP2579802B2 (en) Measurement probe for 3D measurement
CN115556143A (en) Laser displacement sensor, mechanical arm posture sensing unit and composite robot
JPS59109904U (en) Measuring position detection device for stylus type shape measuring machine
JPS60154804U (en) distance measuring device
JPS58138016U (en) vertical distance measuring instrument
JPS5971108U (en) Optical high-precision dimension measuring device
KR960027572A (en) Shadow Mask Curvature Measurement System
JPS59157791U (en) Light concentrator positioning device
JPH0233171B2 (en)
JPS5971350U (en) Reduction projection exposure equipment
JPH07318311A (en) Measuring device