JPS5968205U - Automatic dimension measuring device - Google Patents
Automatic dimension measuring deviceInfo
- Publication number
- JPS5968205U JPS5968205U JP16542582U JP16542582U JPS5968205U JP S5968205 U JPS5968205 U JP S5968205U JP 16542582 U JP16542582 U JP 16542582U JP 16542582 U JP16542582 U JP 16542582U JP S5968205 U JPS5968205 U JP S5968205U
- Authority
- JP
- Japan
- Prior art keywords
- measured
- axis
- measuring device
- light beam
- dimension measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図はこの考案による自動寸法測定装置の全体の構成
を示す斜視図、第2図はこの考案の装置により寸法を測
定することができる被測定体の一例を示す平面図、第3
図はこの考案による装置の電気的な構成を説明するため
のブロック図、第4図はこの考案による装置の姿勢検出
手段を説明するための平面図、第5図はこの考案による
装置の寸法測定動作を説明するための平面図、第6図は
この考案による自動寸法測定装置の動作を説明するため
のフローチャートである。
1:測定器本体、2:制御装置、3:架台、4:テーブ
ル受台、5:光学顕微鏡、6:テーブル、7x。
8Y、9θ:テーブル駆動手段、IIX、12Y:測尺
手段、13:光ビーム、14:光源、15:受光器、1
6:計数器、17:演算手段、18:テーブル ′制
御手段、19:被測定体、21:プリンタ。FIG. 1 is a perspective view showing the overall configuration of an automatic dimension measuring device according to this invention, FIG. 2 is a plan view showing an example of an object to be measured whose dimensions can be measured by the device according to this invention, and FIG.
The figure is a block diagram for explaining the electrical configuration of the device according to this invention, FIG. 4 is a plan view for explaining the attitude detection means of the device according to this invention, and FIG. 5 is a dimensional measurement of the device according to this invention. FIG. 6 is a plan view for explaining the operation, and a flowchart for explaining the operation of the automatic dimension measuring device according to this invention. 1: Measuring instrument body, 2: Control device, 3: Frame, 4: Table pedestal, 5: Optical microscope, 6: Table, 7x. 8Y, 9θ: table driving means, IIX, 12Y: measuring means, 13: light beam, 14: light source, 15: light receiver, 1
6: Counter, 17: Calculation means, 18: Table' control means, 19: Measured object, 21: Printer.
Claims (1)
自由に移動できるように支持された被測定体のテーブル
と、 B このテーブルをX軸、Y軸及びθ軸方向に駆動する
駆動手段と、 C上記テーブルのX軸、Y軸及びθ軸方向の移動量を計
測する測尺手段と、 D 上記テーブルを透過する光ビームを発射する光源及
びその光ビームを受光する受光器から成る被測定体の存
在を検出する手段と、 E 上記テーブルを予め決められた順序でX軸及びY軸
方向に移動させ上記光ビームにより上記被測定体を走査
する自動走査手段と、 F この自動走査手段により上記テーブルがX軸及びY
軸方向に移動するとき上記光ビームが被測定体により遮
光される毎及び遮光状態から解放される毎に上記被測定
体の位置を取込む計数器と、 G この計数器で取込まれた被測定体の位置データによ
り被測定体の各部の寸法を算出する演算手段と、 を具備して成る自動寸法測定装置。[Scope of Claim for Utility Model Registration] A. A table of an object to be measured formed of a transparent plate and supported so as to be freely movable in the X-axis, Y-axis, and θ-axis directions, and B. A driving means for driving in the θ-axis direction; C. A measuring means for measuring the amount of movement of the table in the X-axis, Y-axis, and θ-axis directions; D. A light source and its light beam for emitting a light beam that passes through the table. means for detecting the presence of the object to be measured, which comprises a light receiver that receives light; means, F. The automatic scanning means allows the table to be
a counter that captures the position of the object to be measured each time the light beam is blocked by the object to be measured and released from the blocking state when moving in the axial direction; An automatic dimension measuring device comprising: arithmetic means for calculating dimensions of each part of an object to be measured based on position data of the object to be measured;
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16542582U JPS5968205U (en) | 1982-10-30 | 1982-10-30 | Automatic dimension measuring device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16542582U JPS5968205U (en) | 1982-10-30 | 1982-10-30 | Automatic dimension measuring device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5968205U true JPS5968205U (en) | 1984-05-09 |
Family
ID=30362428
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16542582U Pending JPS5968205U (en) | 1982-10-30 | 1982-10-30 | Automatic dimension measuring device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5968205U (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5572804A (en) * | 1978-11-28 | 1980-06-02 | Fujitsu Ltd | Pattern check system |
-
1982
- 1982-10-30 JP JP16542582U patent/JPS5968205U/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5572804A (en) * | 1978-11-28 | 1980-06-02 | Fujitsu Ltd | Pattern check system |
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