JPS5885491U - Optical marking processing equipment - Google Patents
Optical marking processing equipmentInfo
- Publication number
- JPS5885491U JPS5885491U JP1981178762U JP17876281U JPS5885491U JP S5885491 U JPS5885491 U JP S5885491U JP 1981178762 U JP1981178762 U JP 1981178762U JP 17876281 U JP17876281 U JP 17876281U JP S5885491 U JPS5885491 U JP S5885491U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- sample stage
- optical system
- processing equipment
- optical marking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例を示す概略図である。
１・・・・・・加工用レーザ源、２・・・・・・レンズ
系、３゜３１・・・・・・反射ミラー、４・・・・・・
結像レンズ、５゜３５．３６・・・・・・レーザ光、６
・・曲技加工物、７・・・・・・試料、８・・・・・・
レーザ測長用ミラー、９・・・・・・テーブル、１０・
・曲ｚ軸用クサビ、１１・・曲Ｙ軸用テーブル、１２・
・・・・・Ｘ軸周テーブル、１３・・・・・・ベース、
１４・・・・・・Ｘ軸周駆動モータ、１５・・・・・・
Ｚ軸周駆動モータ、１７・・・・・・Ｘ軸用送りネジ、
１８・・・・・・Ｚ軸用送りネジ、１９・・・・・・軸
受、２０・・・・・・真空箱、２１・・・・・・計算機
、２２・・・・・・データ処理装置、２３・・・・・・
２次元レーザ測長器、２４．３２・・・・・・レーザ測
長用光学窓、２５． ２６． ２７． ３４・・・・・
・信号ライン、２８・・・・・・測長用レーザ光、２９
・・・・・・自動焦点コントローラ、３０・・曲レーザ
測長器、３３・・・・・・電流導入端子。FIG. 1 is a schematic diagram showing an embodiment of the present invention. 1...Laser source for processing, 2...Lens system, 3゜31...Reflection mirror, 4...
Imaging lens, 5°35.36... Laser light, 6
...Aerobatic workpiece, 7... Sample, 8...
Mirror for laser length measurement, 9... Table, 10.
・Wedge for curved Z-axis, 11・・Table for curved Y-axis, 12・
...X-axis circumferential table, 13...Base,
14...X-axis circumferential drive motor, 15...
Z-axis circumferential drive motor, 17...X-axis feed screw,
18... Z-axis feed screw, 19... Bearing, 20... Vacuum box, 21... Computer, 22... Data processing Device, 23...
Two-dimensional laser length measurement device, 24.32... Optical window for laser length measurement, 25. 26. 27. 34...
・Signal line, 28...Laser beam for length measurement, 29
...Automatic focus controller, 30...Curved laser length measuring device, 33...Current introduction terminal.
Claims (1)
ポット径に絞るためのレンズ群を有す光学系と、３次元
移動を行い、かつ、被加工物を搭載可能な試料台と、上
記試料台上の上記被加工物に平行な２次元座標を検出し
、かつ、上記レーザ光学系と上記被加工物との距離を一
定に保つため上記被加工物の面に垂直な方向の距離を検
出する検出系と、上記光学系、上記試料台および上記検
出系の各機能を有機的に結合して正確に刻線するための
制御系とを具備してなることを特徴とする先刻線加工装
置。An apparatus for marking lines includes an optical system having a lens group for focusing a laser beam to a minute spot diameter, a sample stage that can move in three dimensions and on which a workpiece can be mounted, and a sample stage on the sample stage. Detection of two-dimensional coordinates parallel to the workpiece, and detecting a distance in a direction perpendicular to the surface of the workpiece in order to maintain a constant distance between the laser optical system and the workpiece. 1. A pre-scoring line processing apparatus, comprising: a pre-scoring system, and a control system for organically combining the functions of the optical system, the sample stage, and the detection system to accurately score lines.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981178762U JPS5885491U (en) | 1981-12-02 | 1981-12-02 | Optical marking processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981178762U JPS5885491U (en) | 1981-12-02 | 1981-12-02 | Optical marking processing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5885491U true JPS5885491U (en) | 1983-06-09 |
Family
ID=29973854
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981178762U Pending JPS5885491U (en) | 1981-12-02 | 1981-12-02 | Optical marking processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5885491U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01289592A (en) * | 1988-05-16 | 1989-11-21 | Nec Corp | Laser beam machine |
| JPH06134590A (en) * | 1992-10-27 | 1994-05-17 | Matsushita Electric Ind Co Ltd | Laser beam machine |
-
1981
- 1981-12-02 JP JP1981178762U patent/JPS5885491U/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01289592A (en) * | 1988-05-16 | 1989-11-21 | Nec Corp | Laser beam machine |
| JPH06134590A (en) * | 1992-10-27 | 1994-05-17 | Matsushita Electric Ind Co Ltd | Laser beam machine |
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