JPS5557807A - Production of diffraction grating - Google Patents

Production of diffraction grating

Info

Publication number
JPS5557807A
JPS5557807A JP13054478A JP13054478A JPS5557807A JP S5557807 A JPS5557807 A JP S5557807A JP 13054478 A JP13054478 A JP 13054478A JP 13054478 A JP13054478 A JP 13054478A JP S5557807 A JPS5557807 A JP S5557807A
Authority
JP
Japan
Prior art keywords
grating
metal film
diffraction grating
mask
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13054478A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0435726B2 (enrdf_load_stackoverflow
Inventor
Shigeo Yamashita
Tadashi Fukuzawa
Michiharu Nakamura
Junichi Umeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13054478A priority Critical patent/JPS5557807A/ja
Publication of JPS5557807A publication Critical patent/JPS5557807A/ja
Publication of JPH0435726B2 publication Critical patent/JPH0435726B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0018—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means for preventing ghost images

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP13054478A 1978-10-25 1978-10-25 Production of diffraction grating Granted JPS5557807A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13054478A JPS5557807A (en) 1978-10-25 1978-10-25 Production of diffraction grating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13054478A JPS5557807A (en) 1978-10-25 1978-10-25 Production of diffraction grating

Publications (2)

Publication Number Publication Date
JPS5557807A true JPS5557807A (en) 1980-04-30
JPH0435726B2 JPH0435726B2 (enrdf_load_stackoverflow) 1992-06-12

Family

ID=15036812

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13054478A Granted JPS5557807A (en) 1978-10-25 1978-10-25 Production of diffraction grating

Country Status (1)

Country Link
JP (1) JPS5557807A (enrdf_load_stackoverflow)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56137118A (en) * 1980-03-29 1981-10-26 Rikagaku Kenkyusho Production of lamellar diffraction grating
JPS60103308A (ja) * 1983-11-11 1985-06-07 Pioneer Electronic Corp マイクロフレネルレンズの製造方法
JPS60103307A (ja) * 1983-11-11 1985-06-07 Pioneer Electronic Corp マイクロフレネルレンズの製造方法
US5436764A (en) * 1992-04-21 1995-07-25 Matsushita Electric Industrial Co., Ltd. Die for forming a micro-optical element, manufacturing method therefor, micro-optical element and manufacturing method therefor
JP2011022547A (ja) * 2009-06-17 2011-02-03 Sumitomo Electric Ind Ltd 回折格子の形成方法
US8711482B2 (en) 2009-12-04 2014-04-29 Panasonic Corporation Pressing mold for optical lenses and method for manufacturing glass optical lenses
CN104459854A (zh) * 2013-09-22 2015-03-25 清华大学 金属光栅的制备方法
US9827209B2 (en) * 2015-02-09 2017-11-28 Microsoft Technology Licensing, Llc Display system
US10018844B2 (en) 2015-02-09 2018-07-10 Microsoft Technology Licensing, Llc Wearable image display system
US10254942B2 (en) 2014-07-31 2019-04-09 Microsoft Technology Licensing, Llc Adaptive sizing and positioning of application windows
US10317677B2 (en) 2015-02-09 2019-06-11 Microsoft Technology Licensing, Llc Display system
US10592080B2 (en) 2014-07-31 2020-03-17 Microsoft Technology Licensing, Llc Assisted presentation of application windows
US10678412B2 (en) 2014-07-31 2020-06-09 Microsoft Technology Licensing, Llc Dynamic joint dividers for application windows
US11086216B2 (en) 2015-02-09 2021-08-10 Microsoft Technology Licensing, Llc Generating electronic components
CN116603700A (zh) * 2022-02-08 2023-08-18 成都拓米双都光电有限公司 一种支撑栅板的制备方法

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56137118A (en) * 1980-03-29 1981-10-26 Rikagaku Kenkyusho Production of lamellar diffraction grating
JPS60103308A (ja) * 1983-11-11 1985-06-07 Pioneer Electronic Corp マイクロフレネルレンズの製造方法
JPS60103307A (ja) * 1983-11-11 1985-06-07 Pioneer Electronic Corp マイクロフレネルレンズの製造方法
US5436764A (en) * 1992-04-21 1995-07-25 Matsushita Electric Industrial Co., Ltd. Die for forming a micro-optical element, manufacturing method therefor, micro-optical element and manufacturing method therefor
JP2011022547A (ja) * 2009-06-17 2011-02-03 Sumitomo Electric Ind Ltd 回折格子の形成方法
US8711482B2 (en) 2009-12-04 2014-04-29 Panasonic Corporation Pressing mold for optical lenses and method for manufacturing glass optical lenses
CN104459854A (zh) * 2013-09-22 2015-03-25 清华大学 金属光栅的制备方法
US10254942B2 (en) 2014-07-31 2019-04-09 Microsoft Technology Licensing, Llc Adaptive sizing and positioning of application windows
US10592080B2 (en) 2014-07-31 2020-03-17 Microsoft Technology Licensing, Llc Assisted presentation of application windows
US10678412B2 (en) 2014-07-31 2020-06-09 Microsoft Technology Licensing, Llc Dynamic joint dividers for application windows
US9827209B2 (en) * 2015-02-09 2017-11-28 Microsoft Technology Licensing, Llc Display system
US10018844B2 (en) 2015-02-09 2018-07-10 Microsoft Technology Licensing, Llc Wearable image display system
US10317677B2 (en) 2015-02-09 2019-06-11 Microsoft Technology Licensing, Llc Display system
US11086216B2 (en) 2015-02-09 2021-08-10 Microsoft Technology Licensing, Llc Generating electronic components
CN116603700A (zh) * 2022-02-08 2023-08-18 成都拓米双都光电有限公司 一种支撑栅板的制备方法

Also Published As

Publication number Publication date
JPH0435726B2 (enrdf_load_stackoverflow) 1992-06-12

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