JPS5555534A - Method of making pattern by electron beam - Google Patents
Method of making pattern by electron beamInfo
- Publication number
- JPS5555534A JPS5555534A JP12798978A JP12798978A JPS5555534A JP S5555534 A JPS5555534 A JP S5555534A JP 12798978 A JP12798978 A JP 12798978A JP 12798978 A JP12798978 A JP 12798978A JP S5555534 A JPS5555534 A JP S5555534A
- Authority
- JP
- Japan
- Prior art keywords
- patterns
- directions
- electron beam
- prevent
- making pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To prevent the distortion of nearby patterns due to a proximity effect, by irradiating a beam upon the patterns in different scanning directions.
CONSTITUTION: Contour lines of quantities irradiated by the scanning of a beam in a direction X are shown by dotted lines in Fig. The extension difference dy-dx between the directions X, Y is about 0.2μm. Therefore, adjacent patterns are scanned by a beam in perpendicular directions to prevent the patterns from being distorted due to the superposition of charge stored around their parts irradiated with the beam.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12798978A JPS5555534A (en) | 1978-10-18 | 1978-10-18 | Method of making pattern by electron beam |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12798978A JPS5555534A (en) | 1978-10-18 | 1978-10-18 | Method of making pattern by electron beam |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5555534A true JPS5555534A (en) | 1980-04-23 |
JPS6243334B2 JPS6243334B2 (en) | 1987-09-12 |
Family
ID=14973689
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12798978A Granted JPS5555534A (en) | 1978-10-18 | 1978-10-18 | Method of making pattern by electron beam |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5555534A (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0449647Y2 (en) * | 1987-04-28 | 1992-11-24 | ||
JPH0391716A (en) * | 1989-09-05 | 1991-04-17 | Nec Home Electron Ltd | Cooling device and liquid crystal projector using the same |
-
1978
- 1978-10-18 JP JP12798978A patent/JPS5555534A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6243334B2 (en) | 1987-09-12 |
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