JPS5548924A - Jig for wafer transfer in bulk - Google Patents

Jig for wafer transfer in bulk

Info

Publication number
JPS5548924A
JPS5548924A JP12035878A JP12035878A JPS5548924A JP S5548924 A JPS5548924 A JP S5548924A JP 12035878 A JP12035878 A JP 12035878A JP 12035878 A JP12035878 A JP 12035878A JP S5548924 A JPS5548924 A JP S5548924A
Authority
JP
Japan
Prior art keywords
container
wafers
parts
transfer
jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12035878A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6125216B2 (enrdf_load_stackoverflow
Inventor
Tetsuya Goto
Minoru Ikeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12035878A priority Critical patent/JPS5548924A/ja
Publication of JPS5548924A publication Critical patent/JPS5548924A/ja
Publication of JPS6125216B2 publication Critical patent/JPS6125216B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Packaging For Recording Disks (AREA)
  • Packaging Frangible Articles (AREA)
JP12035878A 1978-10-02 1978-10-02 Jig for wafer transfer in bulk Granted JPS5548924A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12035878A JPS5548924A (en) 1978-10-02 1978-10-02 Jig for wafer transfer in bulk

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12035878A JPS5548924A (en) 1978-10-02 1978-10-02 Jig for wafer transfer in bulk

Publications (2)

Publication Number Publication Date
JPS5548924A true JPS5548924A (en) 1980-04-08
JPS6125216B2 JPS6125216B2 (enrdf_load_stackoverflow) 1986-06-14

Family

ID=14784223

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12035878A Granted JPS5548924A (en) 1978-10-02 1978-10-02 Jig for wafer transfer in bulk

Country Status (1)

Country Link
JP (1) JPS5548924A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5777153A (en) * 1980-09-02 1982-05-14 Heraeus Schott Quarzschmelze Method and apparatus for transporting article between carrier member
JPS58178535A (ja) * 1982-04-13 1983-10-19 Nec Kyushu Ltd 半導体基板の移し替え装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5777153A (en) * 1980-09-02 1982-05-14 Heraeus Schott Quarzschmelze Method and apparatus for transporting article between carrier member
JPS58178535A (ja) * 1982-04-13 1983-10-19 Nec Kyushu Ltd 半導体基板の移し替え装置

Also Published As

Publication number Publication date
JPS6125216B2 (enrdf_load_stackoverflow) 1986-06-14

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