JPS5544931A - Temperature characteristics tester - Google Patents

Temperature characteristics tester

Info

Publication number
JPS5544931A
JPS5544931A JP11819278A JP11819278A JPS5544931A JP S5544931 A JPS5544931 A JP S5544931A JP 11819278 A JP11819278 A JP 11819278A JP 11819278 A JP11819278 A JP 11819278A JP S5544931 A JPS5544931 A JP S5544931A
Authority
JP
Japan
Prior art keywords
base
cooler
heater
temperature
specimen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11819278A
Other languages
Japanese (ja)
Inventor
Hiroshi Tokunaga
Nobuo Toyokura
Toru Shinoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11819278A priority Critical patent/JPS5544931A/en
Publication of JPS5544931A publication Critical patent/JPS5544931A/en
Pending legal-status Critical Current

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  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

PURPOSE: To largely shorten the time required to raise or lower the temperature of a specimen base in a temperature characteristics tester by separately providing the specimen base for carrying a specimen, a heater and a cooler.
CONSTITUTION: A heater 2' is set at high temperature (for example, at 300°C.) and a cooler 3' is at low temperature (for example, at 25°C.) in advance, and a rotary shaft 5 is mounted rotatably at the base 1 carrying a semiconductor wafer 11 thereon to thereby make the cooler 3' first contact with the base 1. After the characteristics of any semiconductor element formed on the wafer 11 as carried on the base 1 in this state are measured by a probe (containing a needle 12 and lead wire 13), the lead wire 13 is connected to a DC power supply to thereby apply predetermined reverse voltage to the semiconductor element. When the shaft 5 is then reotated, the cooler 3' is separated from the base 1 and the heater 2 is contacted with the base 1, the base 1 is heated at high teperature rapidly and retained at the temperature of the heater 2'.
COPYRIGHT: (C)1980,JPO&Japio
JP11819278A 1978-09-26 1978-09-26 Temperature characteristics tester Pending JPS5544931A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11819278A JPS5544931A (en) 1978-09-26 1978-09-26 Temperature characteristics tester

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11819278A JPS5544931A (en) 1978-09-26 1978-09-26 Temperature characteristics tester

Publications (1)

Publication Number Publication Date
JPS5544931A true JPS5544931A (en) 1980-03-29

Family

ID=14730429

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11819278A Pending JPS5544931A (en) 1978-09-26 1978-09-26 Temperature characteristics tester

Country Status (1)

Country Link
JP (1) JPS5544931A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5084671A (en) * 1987-09-02 1992-01-28 Tokyo Electron Limited Electric probing-test machine having a cooling system
JP2008309710A (en) * 2007-06-15 2008-12-25 Sumitomo Electric Ind Ltd Device evaluation system and device evaluation method
CN105588958A (en) * 2016-01-22 2016-05-18 中山大学 Rapid multifunctional electronic component temperature characteristic measuring instrument and testing cavity

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5084671A (en) * 1987-09-02 1992-01-28 Tokyo Electron Limited Electric probing-test machine having a cooling system
JP2008309710A (en) * 2007-06-15 2008-12-25 Sumitomo Electric Ind Ltd Device evaluation system and device evaluation method
CN105588958A (en) * 2016-01-22 2016-05-18 中山大学 Rapid multifunctional electronic component temperature characteristic measuring instrument and testing cavity

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