JPS5544931A - Temperature characteristics tester - Google Patents
Temperature characteristics testerInfo
- Publication number
- JPS5544931A JPS5544931A JP11819278A JP11819278A JPS5544931A JP S5544931 A JPS5544931 A JP S5544931A JP 11819278 A JP11819278 A JP 11819278A JP 11819278 A JP11819278 A JP 11819278A JP S5544931 A JPS5544931 A JP S5544931A
- Authority
- JP
- Japan
- Prior art keywords
- base
- cooler
- heater
- temperature
- specimen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
PURPOSE: To largely shorten the time required to raise or lower the temperature of a specimen base in a temperature characteristics tester by separately providing the specimen base for carrying a specimen, a heater and a cooler.
CONSTITUTION: A heater 2' is set at high temperature (for example, at 300°C.) and a cooler 3' is at low temperature (for example, at 25°C.) in advance, and a rotary shaft 5 is mounted rotatably at the base 1 carrying a semiconductor wafer 11 thereon to thereby make the cooler 3' first contact with the base 1. After the characteristics of any semiconductor element formed on the wafer 11 as carried on the base 1 in this state are measured by a probe (containing a needle 12 and lead wire 13), the lead wire 13 is connected to a DC power supply to thereby apply predetermined reverse voltage to the semiconductor element. When the shaft 5 is then reotated, the cooler 3' is separated from the base 1 and the heater 2 is contacted with the base 1, the base 1 is heated at high teperature rapidly and retained at the temperature of the heater 2'.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11819278A JPS5544931A (en) | 1978-09-26 | 1978-09-26 | Temperature characteristics tester |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11819278A JPS5544931A (en) | 1978-09-26 | 1978-09-26 | Temperature characteristics tester |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5544931A true JPS5544931A (en) | 1980-03-29 |
Family
ID=14730429
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11819278A Pending JPS5544931A (en) | 1978-09-26 | 1978-09-26 | Temperature characteristics tester |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5544931A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5084671A (en) * | 1987-09-02 | 1992-01-28 | Tokyo Electron Limited | Electric probing-test machine having a cooling system |
JP2008309710A (en) * | 2007-06-15 | 2008-12-25 | Sumitomo Electric Ind Ltd | Device evaluation system and device evaluation method |
CN105588958A (en) * | 2016-01-22 | 2016-05-18 | 中山大学 | Rapid multifunctional electronic component temperature characteristic measuring instrument and testing cavity |
-
1978
- 1978-09-26 JP JP11819278A patent/JPS5544931A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5084671A (en) * | 1987-09-02 | 1992-01-28 | Tokyo Electron Limited | Electric probing-test machine having a cooling system |
JP2008309710A (en) * | 2007-06-15 | 2008-12-25 | Sumitomo Electric Ind Ltd | Device evaluation system and device evaluation method |
CN105588958A (en) * | 2016-01-22 | 2016-05-18 | 中山大学 | Rapid multifunctional electronic component temperature characteristic measuring instrument and testing cavity |
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