JPS53141984A - Positioning device for microscopic parts - Google Patents

Positioning device for microscopic parts

Info

Publication number
JPS53141984A
JPS53141984A JP5637477A JP5637477A JPS53141984A JP S53141984 A JPS53141984 A JP S53141984A JP 5637477 A JP5637477 A JP 5637477A JP 5637477 A JP5637477 A JP 5637477A JP S53141984 A JPS53141984 A JP S53141984A
Authority
JP
Japan
Prior art keywords
positioning device
positioning
microscopic parts
prober
microscopic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5637477A
Other languages
Japanese (ja)
Other versions
JPS5641373B2 (en
Inventor
Hideo Iwamoto
Masato Ichihashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5637477A priority Critical patent/JPS53141984A/en
Publication of JPS53141984A publication Critical patent/JPS53141984A/en
Publication of JPS5641373B2 publication Critical patent/JPS5641373B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Automatic Assembly (AREA)

Abstract

PURPOSE: To provide a positioning device which is ideal for positioning an electrode and the tip of a prober to contact and others when electric characteristics of semi-conductor elements are examined with a prober and also can make the positioning operation itself easy and accurate and additionally automatic.
COPYRIGHT: (C)1978,JPO&Japio
JP5637477A 1977-05-18 1977-05-18 Positioning device for microscopic parts Granted JPS53141984A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5637477A JPS53141984A (en) 1977-05-18 1977-05-18 Positioning device for microscopic parts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5637477A JPS53141984A (en) 1977-05-18 1977-05-18 Positioning device for microscopic parts

Publications (2)

Publication Number Publication Date
JPS53141984A true JPS53141984A (en) 1978-12-11
JPS5641373B2 JPS5641373B2 (en) 1981-09-28

Family

ID=13025476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5637477A Granted JPS53141984A (en) 1977-05-18 1977-05-18 Positioning device for microscopic parts

Country Status (1)

Country Link
JP (1) JPS53141984A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4975018A (en) * 1987-03-30 1990-12-04 Robert Bosch Gmbh Linear unit for transferring objects

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4975018A (en) * 1987-03-30 1990-12-04 Robert Bosch Gmbh Linear unit for transferring objects

Also Published As

Publication number Publication date
JPS5641373B2 (en) 1981-09-28

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