JPS53141984A - Positioning device for microscopic parts - Google Patents
Positioning device for microscopic partsInfo
- Publication number
- JPS53141984A JPS53141984A JP5637477A JP5637477A JPS53141984A JP S53141984 A JPS53141984 A JP S53141984A JP 5637477 A JP5637477 A JP 5637477A JP 5637477 A JP5637477 A JP 5637477A JP S53141984 A JPS53141984 A JP S53141984A
- Authority
- JP
- Japan
- Prior art keywords
- positioning device
- positioning
- microscopic parts
- prober
- microscopic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Automatic Assembly (AREA)
Abstract
PURPOSE: To provide a positioning device which is ideal for positioning an electrode and the tip of a prober to contact and others when electric characteristics of semi-conductor elements are examined with a prober and also can make the positioning operation itself easy and accurate and additionally automatic.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5637477A JPS53141984A (en) | 1977-05-18 | 1977-05-18 | Positioning device for microscopic parts |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5637477A JPS53141984A (en) | 1977-05-18 | 1977-05-18 | Positioning device for microscopic parts |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53141984A true JPS53141984A (en) | 1978-12-11 |
JPS5641373B2 JPS5641373B2 (en) | 1981-09-28 |
Family
ID=13025476
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5637477A Granted JPS53141984A (en) | 1977-05-18 | 1977-05-18 | Positioning device for microscopic parts |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53141984A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4975018A (en) * | 1987-03-30 | 1990-12-04 | Robert Bosch Gmbh | Linear unit for transferring objects |
-
1977
- 1977-05-18 JP JP5637477A patent/JPS53141984A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4975018A (en) * | 1987-03-30 | 1990-12-04 | Robert Bosch Gmbh | Linear unit for transferring objects |
Also Published As
Publication number | Publication date |
---|---|
JPS5641373B2 (en) | 1981-09-28 |
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