JPS5541786A - Method of forming metal image - Google Patents
Method of forming metal imageInfo
- Publication number
- JPS5541786A JPS5541786A JP11609278A JP11609278A JPS5541786A JP S5541786 A JPS5541786 A JP S5541786A JP 11609278 A JP11609278 A JP 11609278A JP 11609278 A JP11609278 A JP 11609278A JP S5541786 A JPS5541786 A JP S5541786A
- Authority
- JP
- Japan
- Prior art keywords
- partitions
- image
- width
- etching
- photoresist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: To provide the subject method comprising the steps of: providing partitions consisting of photoresists the intervals of which are defined on the substrate, applying metal films on the partitioned regions, and removing by etching metal films in the unnecessary partitions while masking the partitioned regions with the resists thereby to obtain a fine metal wiring.
CONSTITUTION: If the substrate 1 is made of a material unable to be electroplated, a plated layer 2 which becomes a surface layer is firstly applied thereon, and there are formed thereon partitions 7 consisting of plating photoresist images having a width d of less than 10μm at an interval of l the same as the width t of the fine image 5 formed subsequently. Then, while the layer 2 encircled by partitions 7 is subjected to photoresist coat plating to form the metal film 3, the film 3 is divided into two parts 3a and 3b without adhering to the partitions 7. Thereafter, an etching photoresist image 8 containing the upper parts of partitions 7 at both sides are removed by etching using the image 8 as a mask. Then, the partitions 7 and the image 8 are removed, and only the fine image 5 having the width t being caused to remain at the central part.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11609278A JPS5541786A (en) | 1978-09-19 | 1978-09-19 | Method of forming metal image |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11609278A JPS5541786A (en) | 1978-09-19 | 1978-09-19 | Method of forming metal image |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5541786A true JPS5541786A (en) | 1980-03-24 |
Family
ID=14678504
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11609278A Pending JPS5541786A (en) | 1978-09-19 | 1978-09-19 | Method of forming metal image |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5541786A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5095147A (en) * | 1973-12-20 | 1975-07-29 |
-
1978
- 1978-09-19 JP JP11609278A patent/JPS5541786A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5095147A (en) * | 1973-12-20 | 1975-07-29 |
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