JPS5536968A - P type compound semiconductor gas phase growth method - Google Patents

P type compound semiconductor gas phase growth method

Info

Publication number
JPS5536968A
JPS5536968A JP10995578A JP10995578A JPS5536968A JP S5536968 A JPS5536968 A JP S5536968A JP 10995578 A JP10995578 A JP 10995578A JP 10995578 A JP10995578 A JP 10995578A JP S5536968 A JPS5536968 A JP S5536968A
Authority
JP
Japan
Prior art keywords
zinc
reservoir
gas phase
valve
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10995578A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6143845B2 (enrdf_load_stackoverflow
Inventor
Katsunobu Maeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Original Assignee
Mitsubishi Monsanto Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Monsanto Chemical Co filed Critical Mitsubishi Monsanto Chemical Co
Priority to JP10995578A priority Critical patent/JPS5536968A/ja
Publication of JPS5536968A publication Critical patent/JPS5536968A/ja
Publication of JPS6143845B2 publication Critical patent/JPS6143845B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP10995578A 1978-09-07 1978-09-07 P type compound semiconductor gas phase growth method Granted JPS5536968A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10995578A JPS5536968A (en) 1978-09-07 1978-09-07 P type compound semiconductor gas phase growth method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10995578A JPS5536968A (en) 1978-09-07 1978-09-07 P type compound semiconductor gas phase growth method

Publications (2)

Publication Number Publication Date
JPS5536968A true JPS5536968A (en) 1980-03-14
JPS6143845B2 JPS6143845B2 (enrdf_load_stackoverflow) 1986-09-30

Family

ID=14523359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10995578A Granted JPS5536968A (en) 1978-09-07 1978-09-07 P type compound semiconductor gas phase growth method

Country Status (1)

Country Link
JP (1) JPS5536968A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63165131U (enrdf_load_stackoverflow) * 1987-04-17 1988-10-27

Also Published As

Publication number Publication date
JPS6143845B2 (enrdf_load_stackoverflow) 1986-09-30

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