JPS5516555A - Manufacture of thin film of zinc oxide - Google Patents
Manufacture of thin film of zinc oxideInfo
- Publication number
- JPS5516555A JPS5516555A JP8916478A JP8916478A JPS5516555A JP S5516555 A JPS5516555 A JP S5516555A JP 8916478 A JP8916478 A JP 8916478A JP 8916478 A JP8916478 A JP 8916478A JP S5516555 A JPS5516555 A JP S5516555A
- Authority
- JP
- Japan
- Prior art keywords
- zinc
- thin film
- lithium
- zinc oxide
- manufacture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 title abstract 6
- 239000011787 zinc oxide Substances 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000010409 thin film Substances 0.000 title abstract 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 abstract 5
- 229910052725 zinc Inorganic materials 0.000 abstract 5
- 239000011701 zinc Substances 0.000 abstract 5
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 abstract 3
- 229910052744 lithium Inorganic materials 0.000 abstract 3
- 229910052751 metal Inorganic materials 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 2
- 238000004544 sputter deposition Methods 0.000 abstract 2
- 229960001296 zinc oxide Drugs 0.000 abstract 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 239000004411 aluminium Substances 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052796 boron Inorganic materials 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 238000005336 cracking Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000006104 solid solution Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
PURPOSE:To maintain piezoelectric characteristics while lessening strain by sputtering metal, smaller in ion radius than lithium and zinc, at the same time as zinc in a manufacturing method for a thin film of zinc oxide by sputtering zinc. CONSTITUTION:At the same time as zinc, metal (boron, aluminium, silicon, etc.) is sputtered which is not less than tervalent and smaller in ion radius than lithium and zinc. As for a zinc-oxide coating of those in a solid-solution state, strain appearing in it can be prevented from enlarging and the glass plate can also be prevented from cracking. Adding lithium stops the resistivity from lowering and piezoelectric characteristics can be maintained.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8916478A JPS5516555A (en) | 1978-07-21 | 1978-07-21 | Manufacture of thin film of zinc oxide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8916478A JPS5516555A (en) | 1978-07-21 | 1978-07-21 | Manufacture of thin film of zinc oxide |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5516555A true JPS5516555A (en) | 1980-02-05 |
Family
ID=13963167
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8916478A Pending JPS5516555A (en) | 1978-07-21 | 1978-07-21 | Manufacture of thin film of zinc oxide |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5516555A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014009384A (en) * | 2012-06-29 | 2014-01-20 | Fujifilm Corp | Wurtzite type composite oxide and piezoelectric element including the same |
| US10854179B2 (en) | 2016-11-01 | 2020-12-01 | Mizuho MIYAJIMA | Cymbal support and method for using cymbal support |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5023918A (en) * | 1973-07-02 | 1975-03-14 | ||
| JPS50119998A (en) * | 1974-03-12 | 1975-09-19 |
-
1978
- 1978-07-21 JP JP8916478A patent/JPS5516555A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5023918A (en) * | 1973-07-02 | 1975-03-14 | ||
| JPS50119998A (en) * | 1974-03-12 | 1975-09-19 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014009384A (en) * | 2012-06-29 | 2014-01-20 | Fujifilm Corp | Wurtzite type composite oxide and piezoelectric element including the same |
| US10854179B2 (en) | 2016-11-01 | 2020-12-01 | Mizuho MIYAJIMA | Cymbal support and method for using cymbal support |
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