JPS5515218A - Manufacturing method of semiconductor wafer - Google Patents

Manufacturing method of semiconductor wafer

Info

Publication number
JPS5515218A
JPS5515218A JP8786478A JP8786478A JPS5515218A JP S5515218 A JPS5515218 A JP S5515218A JP 8786478 A JP8786478 A JP 8786478A JP 8786478 A JP8786478 A JP 8786478A JP S5515218 A JPS5515218 A JP S5515218A
Authority
JP
Japan
Prior art keywords
wafer
etched
shaft
semiconductor wafer
rotary shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8786478A
Other languages
English (en)
Inventor
Fumio Shimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP8786478A priority Critical patent/JPS5515218A/ja
Publication of JPS5515218A publication Critical patent/JPS5515218A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP8786478A 1978-07-18 1978-07-18 Manufacturing method of semiconductor wafer Pending JPS5515218A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8786478A JPS5515218A (en) 1978-07-18 1978-07-18 Manufacturing method of semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8786478A JPS5515218A (en) 1978-07-18 1978-07-18 Manufacturing method of semiconductor wafer

Publications (1)

Publication Number Publication Date
JPS5515218A true JPS5515218A (en) 1980-02-02

Family

ID=13926741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8786478A Pending JPS5515218A (en) 1978-07-18 1978-07-18 Manufacturing method of semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS5515218A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6350342U (ja) * 1982-05-24 1988-04-05

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6350342U (ja) * 1982-05-24 1988-04-05

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