JPS5515133A - Production of plane diffraction grating - Google Patents

Production of plane diffraction grating

Info

Publication number
JPS5515133A
JPS5515133A JP8734478A JP8734478A JPS5515133A JP S5515133 A JPS5515133 A JP S5515133A JP 8734478 A JP8734478 A JP 8734478A JP 8734478 A JP8734478 A JP 8734478A JP S5515133 A JPS5515133 A JP S5515133A
Authority
JP
Japan
Prior art keywords
plane
diffraction grating
production
width
silicon single
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8734478A
Other languages
English (en)
Inventor
Yoji Fujii
Junichiro Minowa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP8734478A priority Critical patent/JPS5515133A/ja
Priority to DE7979102442T priority patent/DE2965192D1/de
Priority to EP82100228A priority patent/EP0059304B1/en
Priority to EP79102442A priority patent/EP0007108B1/en
Priority to DE8282100228T priority patent/DE2967536D1/de
Priority to CA331,934A priority patent/CA1113752A/en
Priority to US06/058,382 priority patent/US4330175A/en
Publication of JPS5515133A publication Critical patent/JPS5515133A/ja
Priority to US06/325,721 priority patent/US4405405A/en
Pending legal-status Critical Current

Links

JP8734478A 1978-07-18 1978-07-18 Production of plane diffraction grating Pending JPS5515133A (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP8734478A JPS5515133A (en) 1978-07-18 1978-07-18 Production of plane diffraction grating
DE7979102442T DE2965192D1 (en) 1978-07-18 1979-07-16 A method of manufacturing a diffraction grating structure
EP82100228A EP0059304B1 (en) 1978-07-18 1979-07-16 A method of manufacturing a curved diffraction grating structure
EP79102442A EP0007108B1 (en) 1978-07-18 1979-07-16 A method of manufacturing a diffraction grating structure
DE8282100228T DE2967536D1 (en) 1978-07-18 1979-07-16 A method of manufacturing a curved diffraction grating structure
CA331,934A CA1113752A (en) 1978-07-18 1979-07-17 Blazed diffraction grating structures and method of manufacturing the same
US06/058,382 US4330175A (en) 1978-07-18 1979-07-17 Blazed diffraction grating structures and method of manufacturing the same
US06/325,721 US4405405A (en) 1978-07-18 1981-11-30 Blazed diffraction grating structures and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8734478A JPS5515133A (en) 1978-07-18 1978-07-18 Production of plane diffraction grating

Publications (1)

Publication Number Publication Date
JPS5515133A true JPS5515133A (en) 1980-02-02

Family

ID=13912242

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8734478A Pending JPS5515133A (en) 1978-07-18 1978-07-18 Production of plane diffraction grating

Country Status (1)

Country Link
JP (1) JPS5515133A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59100404A (ja) * 1982-11-30 1984-06-09 Ricoh Co Ltd 三角形状の反射型レリ−フ回折格子
JPS61242027A (ja) * 1985-04-19 1986-10-28 シ−メンス、アクチエンゲゼルシヤフト 結晶基板の表面に特定格子定数の表面格子を成形する方法
JPH04289411A (ja) * 1991-03-18 1992-10-14 Fujitsu Ltd 測長ｓｅｍ用基準サンプルの製造方法
WO2000016134A1 (en) * 1998-09-10 2000-03-23 Cymer, Inc. Diffraction grating and fabrication technique for same

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59100404A (ja) * 1982-11-30 1984-06-09 Ricoh Co Ltd 三角形状の反射型レリ−フ回折格子
JPH031641B2 (ja) * 1982-11-30 1991-01-11 Ricoh Kk
JPS61242027A (ja) * 1985-04-19 1986-10-28 シ−メンス、アクチエンゲゼルシヤフト 結晶基板の表面に特定格子定数の表面格子を成形する方法
JPH04289411A (ja) * 1991-03-18 1992-10-14 Fujitsu Ltd 測長ｓｅｍ用基準サンプルの製造方法
WO2000016134A1 (en) * 1998-09-10 2000-03-23 Cymer, Inc. Diffraction grating and fabrication technique for same

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