JPS52135842A - Method of anisotropically etching single crystal silicon - Google Patents
Method of anisotropically etching single crystal siliconInfo
- Publication number
- JPS52135842A JPS52135842A JP5224076A JP5224076A JPS52135842A JP S52135842 A JPS52135842 A JP S52135842A JP 5224076 A JP5224076 A JP 5224076A JP 5224076 A JP5224076 A JP 5224076A JP S52135842 A JPS52135842 A JP S52135842A
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- crystal silicon
- anisotropically etching
- etching single
- anisotropically
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5224076A JPS52135842A (en) | 1976-05-10 | 1976-05-10 | Method of anisotropically etching single crystal silicon |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5224076A JPS52135842A (en) | 1976-05-10 | 1976-05-10 | Method of anisotropically etching single crystal silicon |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52135842A true JPS52135842A (en) | 1977-11-14 |
Family
ID=12909185
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5224076A Pending JPS52135842A (en) | 1976-05-10 | 1976-05-10 | Method of anisotropically etching single crystal silicon |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52135842A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006037155A (en) * | 2004-07-26 | 2006-02-09 | Yokohama Rubber Co Ltd:The | Method for adjusting foil thickness of aluminum foil |
-
1976
- 1976-05-10 JP JP5224076A patent/JPS52135842A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006037155A (en) * | 2004-07-26 | 2006-02-09 | Yokohama Rubber Co Ltd:The | Method for adjusting foil thickness of aluminum foil |
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