JPS52135842A - Method of anisotropically etching single crystal silicon - Google Patents

Method of anisotropically etching single crystal silicon

Info

Publication number
JPS52135842A
JPS52135842A JP5224076A JP5224076A JPS52135842A JP S52135842 A JPS52135842 A JP S52135842A JP 5224076 A JP5224076 A JP 5224076A JP 5224076 A JP5224076 A JP 5224076A JP S52135842 A JPS52135842 A JP S52135842A
Authority
JP
Japan
Prior art keywords
single crystal
crystal silicon
anisotropically etching
etching single
anisotropically
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5224076A
Other languages
Japanese (ja)
Inventor
Akio Mimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5224076A priority Critical patent/JPS52135842A/en
Publication of JPS52135842A publication Critical patent/JPS52135842A/en
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP5224076A 1976-05-10 1976-05-10 Method of anisotropically etching single crystal silicon Pending JPS52135842A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5224076A JPS52135842A (en) 1976-05-10 1976-05-10 Method of anisotropically etching single crystal silicon

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5224076A JPS52135842A (en) 1976-05-10 1976-05-10 Method of anisotropically etching single crystal silicon

Publications (1)

Publication Number Publication Date
JPS52135842A true JPS52135842A (en) 1977-11-14

Family

ID=12909185

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5224076A Pending JPS52135842A (en) 1976-05-10 1976-05-10 Method of anisotropically etching single crystal silicon

Country Status (1)

Country Link
JP (1) JPS52135842A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006037155A (en) * 2004-07-26 2006-02-09 Yokohama Rubber Co Ltd:The Method for adjusting foil thickness of aluminum foil

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006037155A (en) * 2004-07-26 2006-02-09 Yokohama Rubber Co Ltd:The Method for adjusting foil thickness of aluminum foil

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