JPS55145171A - Arc-breaking method of glow discharge device using high frequency electric supply source and its apparatus - Google Patents
Arc-breaking method of glow discharge device using high frequency electric supply source and its apparatusInfo
- Publication number
- JPS55145171A JPS55145171A JP5284379A JP5284379A JPS55145171A JP S55145171 A JPS55145171 A JP S55145171A JP 5284379 A JP5284379 A JP 5284379A JP 5284379 A JP5284379 A JP 5284379A JP S55145171 A JPS55145171 A JP S55145171A
- Authority
- JP
- Japan
- Prior art keywords
- glow discharge
- time
- high frequency
- control circuit
- arc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5284379A JPS55145171A (en) | 1979-04-28 | 1979-04-28 | Arc-breaking method of glow discharge device using high frequency electric supply source and its apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5284379A JPS55145171A (en) | 1979-04-28 | 1979-04-28 | Arc-breaking method of glow discharge device using high frequency electric supply source and its apparatus |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20855887A Division JPS63297559A (ja) | 1987-08-22 | 1987-08-22 | 高周波電源を用いたグロ−放電装置のア−クしゃ断方法および装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55145171A true JPS55145171A (en) | 1980-11-12 |
JPH02723B2 JPH02723B2 (ja) | 1990-01-09 |
Family
ID=12926118
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5284379A Granted JPS55145171A (en) | 1979-04-28 | 1979-04-28 | Arc-breaking method of glow discharge device using high frequency electric supply source and its apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55145171A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58148672A (ja) * | 1982-02-19 | 1983-09-03 | ザ デヴィルビス コムパニー | 静電圧制御回路 |
JPS5969965U (ja) * | 1982-11-02 | 1984-05-12 | 日本電子株式会社 | グロ−放電発生装置 |
WO2003037047A1 (fr) * | 2001-10-22 | 2003-05-01 | Shibaura Mechatronics Corporation | Procede permettant d'evaluer un arc de dispositif de decharge luminescente et suppresseur de decharge d'arc haute frequence |
WO2009118920A1 (ja) * | 2008-03-26 | 2009-10-01 | 株式会社京三製作所 | 真空装置用異常放電抑制装置 |
-
1979
- 1979-04-28 JP JP5284379A patent/JPS55145171A/ja active Granted
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58148672A (ja) * | 1982-02-19 | 1983-09-03 | ザ デヴィルビス コムパニー | 静電圧制御回路 |
JPS5969965U (ja) * | 1982-11-02 | 1984-05-12 | 日本電子株式会社 | グロ−放電発生装置 |
WO2003037047A1 (fr) * | 2001-10-22 | 2003-05-01 | Shibaura Mechatronics Corporation | Procede permettant d'evaluer un arc de dispositif de decharge luminescente et suppresseur de decharge d'arc haute frequence |
JPWO2003037047A1 (ja) * | 2001-10-22 | 2005-02-17 | 芝浦メカトロニクス株式会社 | グロー放電装置のアーク判定方法及び高周波アーク放電抑制装置 |
US7301286B2 (en) | 2001-10-22 | 2007-11-27 | Shibaura Mechatronics Corporation | Method of detecting an arc in a glow-discharge device and apparatus for controlling a high-frequency arc discharge |
US7492105B2 (en) | 2001-10-22 | 2009-02-17 | Shibaura Mechatronics Corporation | Method of detecting an arc in a glow-discharge device and apparatus for controlling a high-frequency arc discharge |
US7633242B2 (en) | 2001-10-22 | 2009-12-15 | Shibaura Mechatronics Corporation | Method of detecting an arc in a glow-discharge device and apparatus for controlling a high-frequency arc discharge |
JP4500048B2 (ja) * | 2001-10-22 | 2010-07-14 | 芝浦メカトロニクス株式会社 | グロー放電装置のアーク判定方法及び高周波アーク放電抑制装置 |
US7880403B2 (en) | 2001-10-22 | 2011-02-01 | Shibaura Mechatronics Corporation | Method of detecting an arc in a glow-discharge device and apparatus for controlling a high-frequency arc discharge |
WO2009118920A1 (ja) * | 2008-03-26 | 2009-10-01 | 株式会社京三製作所 | 真空装置用異常放電抑制装置 |
US8169162B2 (en) | 2008-03-26 | 2012-05-01 | Kyosan Electric Mfg. Co., Ltd. | Abnormal discharge suppressing device for vacuum apparatus |
JP5454944B2 (ja) * | 2008-03-26 | 2014-03-26 | 株式会社京三製作所 | 真空装置用異常放電抑制装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH02723B2 (ja) | 1990-01-09 |
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