JPS5513955A - Method for forming thin insulation film - Google Patents
Method for forming thin insulation filmInfo
- Publication number
- JPS5513955A JPS5513955A JP8735678A JP8735678A JPS5513955A JP S5513955 A JPS5513955 A JP S5513955A JP 8735678 A JP8735678 A JP 8735678A JP 8735678 A JP8735678 A JP 8735678A JP S5513955 A JPS5513955 A JP S5513955A
- Authority
- JP
- Japan
- Prior art keywords
- film
- substrate
- thin
- whose
- hfo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8735678A JPS5513955A (en) | 1978-07-17 | 1978-07-17 | Method for forming thin insulation film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8735678A JPS5513955A (en) | 1978-07-17 | 1978-07-17 | Method for forming thin insulation film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5513955A true JPS5513955A (en) | 1980-01-31 |
Family
ID=13912594
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8735678A Pending JPS5513955A (en) | 1978-07-17 | 1978-07-17 | Method for forming thin insulation film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5513955A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57174295U (ja) * | 1981-04-30 | 1982-11-02 | ||
JP2000174379A (ja) * | 1998-12-04 | 2000-06-23 | Mitsubishi Chemicals Corp | 化合物半導体発光素子 |
JP2000323796A (ja) * | 1998-12-04 | 2000-11-24 | Mitsubishi Chemicals Corp | 化合物半導体発光素子 |
JP2008226867A (ja) * | 2007-03-08 | 2008-09-25 | Mitsubishi Electric Corp | 半導体レーザ装置 |
-
1978
- 1978-07-17 JP JP8735678A patent/JPS5513955A/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57174295U (ja) * | 1981-04-30 | 1982-11-02 | ||
JP2000174379A (ja) * | 1998-12-04 | 2000-06-23 | Mitsubishi Chemicals Corp | 化合物半導体発光素子 |
JP2000323796A (ja) * | 1998-12-04 | 2000-11-24 | Mitsubishi Chemicals Corp | 化合物半導体発光素子 |
JP2008226867A (ja) * | 2007-03-08 | 2008-09-25 | Mitsubishi Electric Corp | 半導体レーザ装置 |
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