JPS55130141A - Fabricating method of semiconductor device - Google Patents

Fabricating method of semiconductor device

Info

Publication number
JPS55130141A
JPS55130141A JP3789179A JP3789179A JPS55130141A JP S55130141 A JPS55130141 A JP S55130141A JP 3789179 A JP3789179 A JP 3789179A JP 3789179 A JP3789179 A JP 3789179A JP S55130141 A JPS55130141 A JP S55130141A
Authority
JP
Japan
Prior art keywords
layer
impurity
silicon
protective film
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3789179A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6138859B2 (enrdf_load_stackoverflow
Inventor
Toshio Hashimoto
Tsuguo Inada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3789179A priority Critical patent/JPS55130141A/ja
Publication of JPS55130141A publication Critical patent/JPS55130141A/ja
Publication of JPS6138859B2 publication Critical patent/JPS6138859B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP3789179A 1979-03-30 1979-03-30 Fabricating method of semiconductor device Granted JPS55130141A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3789179A JPS55130141A (en) 1979-03-30 1979-03-30 Fabricating method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3789179A JPS55130141A (en) 1979-03-30 1979-03-30 Fabricating method of semiconductor device

Publications (2)

Publication Number Publication Date
JPS55130141A true JPS55130141A (en) 1980-10-08
JPS6138859B2 JPS6138859B2 (enrdf_load_stackoverflow) 1986-09-01

Family

ID=12510153

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3789179A Granted JPS55130141A (en) 1979-03-30 1979-03-30 Fabricating method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS55130141A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5793524A (en) * 1980-12-03 1982-06-10 Fujitsu Ltd Manufacture of semiconductor device
JPH0294519A (ja) * 1988-09-30 1990-04-05 Sony Corp 半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5793524A (en) * 1980-12-03 1982-06-10 Fujitsu Ltd Manufacture of semiconductor device
JPH0294519A (ja) * 1988-09-30 1990-04-05 Sony Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS6138859B2 (enrdf_load_stackoverflow) 1986-09-01

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